MIOMD-XI Speakers    
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1.  Mr. Mostafa Ghorbanzadeh, University of Tehran, IRAN
Poster: The Impact of Fixed Oxide Charge Density on the Performance of InSb Infrared Focal Plane Arrays
Speaker Biography: Mostafa Ghorbanzadeh: started his study in electronics engineering at the Ferdowsi University of Mashhad, Iran, in 2006. He started his M.Sc. degree at the University of Tehran, Iran in 2011. In 2011 he began to work on his master thesis in the MEMS & NEMS Lab and UTCAD Lab under Prof. M. Fathipour supervision. His research interests are in optoelectronics, solid state physics, nanoelectronics and III/V semiconductors. Currently, he has focused his work on InSb IRFPA design, fabrication and characterization.

Summary: Recently, large-format and small-pitch InfraRed Focal Plane Arrays (IRFPAs) has been developed for high resolution thermal images. By scaling, FPA's Performance decreases due to increase in surface effects. Surface effects can be controlled by controlling surface potential. Surface potential depends on fixed oxide charges in passivation layer. Density of fixed oxide charge in passivation layer can be controlled by varying passivation conditions and methods. These charges can be negative or positive for InSb substrate. For example has reported that negative fixed oxide charge can be fabricated with combination of anodic oxide and Photo-CVD passivation layer.
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