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| 21. | High-power, continuous-wave, phase-locked quantum cascade laser arrays emitting at 8 μm WENJIA ZHOU,QUAN-YONG LU,DONG-HAI WU, STEVEN SLIVKEN, AND MANIJEH RAZEGHI OPTICS EXPRESS 27, 15776-15785-- May 20, 2019 ...[Visit Journal] We report a room-temperature eight-element phase-locked quantum cascade laser
array emitting at 8 μm with a high continuous-wave power of 8.2 W and wall plug efficiency
of 9.5%. The laser array operates primarily via the in-phase supermode and has single-mode
emission with a side-mode suppression ratio of ~20 dB. The quantum cascade laser active
region is based on a high differential gain (8.7 cm/kA) and low voltage defect (90 meV)
design. A record high wall plug efficiency of 20.4% is achieved from a low loss buried ridge
type single-element Fabry-Perot laser operating in pulsed mode at 20 °C. [reprint (PDF)] |
| 21. | Extended short-wavelength infrared nBn photodetectors based on type-II InAs/AlSb/GaSb superlattices with an AlAsSb/GaSb superlattice barrier A. Haddadi, R. Chevallier, A. Dehzangi, and M. Razeghi Applied Physics Letters 110, 101104-- March 8, 2017 ...[Visit Journal] Extended short-wavelength infrared nBn photodetectors based on type-II InAs/AlSb/GaSb superlattices on GaSb substrate have been demonstrated. An AlAsSb/GaSb H-structure superlattice design was used as the large-bandgap electron-barrier in these photodetectors. The photodetector is designed to have a 100% cut-off wavelength of ∼2.8 μm at 300 K. The photodetector exhibited a room-temperature (300 K) peak responsivity of 0.65 A/W at 1.9 μm, corresponding to a quantum efficiency of 41% at zero bias under front-side illumination, without any anti-reflection coating. With an R × A of 78 Ω·cm² and a dark current density of 8 × 10−3 A/cm² under −400 mV applied bias at 300 K, the nBn photodetector exhibited a specific detectivity of 1.51 × 1010 Jones. At 150 K, the photodetector exhibited a dark current density of 9.5 × 10−9 A/cm² and a quantum efficiency of 50%, resulting in a detectivity of 1.12 × 1013 Jones. [reprint (PDF)] |
| 21. | High efficiency quantum cascade laser frequency comb Quanyong Lu, Donghai Wu, Steven Slivken & Manijeh Razeghi Scientific Reports 7, Article number: 43806-- March 6, 2017 ...[Visit Journal] An efficient mid-infrared frequency comb source is of great interest to high speed, high resolution spectroscopy and metrology. Here we demonstrate a mid-IR quantum cascade laser frequency comb with a high power output and narrow beatnote linewidth at room temperature. The active region was designed with a strong-coupling between the injector and the upper lasing level for high internal quantum efficiency and a broadband gain. The group velocity dispersion was engineered for efficient, broadband mode-locking via four wave mixing. The comb device exhibits a narrow intermode beatnote linewidth of 50.5 Hz and a maximum wall-plug efficiency of 6.5% covering a spectral coverage of 110 cm−1 at λ ~ 8 μm. The efficiency is improved by a factor of 6 compared with previous demonstrations. The high power efficiency and narrow beatnote linewidth will greatly expand the applications of quantum cascade laser frequency combs including high-precision remote sensing and spectroscopy. [reprint (PDF)] |
| 21. | 4.5 mW Operation of AlGaN-based 267 nm Deep-Ultraviolet Light-Emitting Diodes A. Yasan, R. McClintock, K. Mayes, D. Shiell, L. Gautero, S.R. Darvish, P. Kung and M. Razeghi Applied Physics Letters, 83 (23)-- December 8, 2003 ...[Visit Journal] We demonstrate 4.5 mW output power from AlGaN-based single quantum well ultraviolet light-emitting diodes at a very short wavelength of 267 nm in pulsed operation mode. The output power in continuous-wave mode reaches a value of 165 µW at an injected current of 435 mA. The measurements were done on arrays of four devices flip chip bonded to AlN submounts for thermal management. [reprint (PDF)] |
| 21. | Type-II superlattice dual-band LWIR imager with M-barrier and Fabry-Perot resonance E.K. Huang, A. Haddadi, G. Chen, B.M. Nguyen, M.A. Hoang, R. McClintock, M. Stegall, and M. Razeghi OSA Optics Letters, Vol. 36, No. 13, p. 2560-2562-- July 1, 2011 ...[Visit Journal] We report a high performance long-wavelength IR dual-band imager based on type-II superlattices with 100% cutoff wavelengths at 9.5 μm (blue channel) and 13 μm (red channel). Test pixels reveal background-limited behavior with specific detectivities as high as ∼5×1011 Jones at 7.9 μm in the blue channel and ∼1×1011 Jones at 10.2 μm in the red channel at 77 K. These performances were attributed to low dark currents thanks to the M-barrier and Fabry–Perot enhanced quantum efficiencies despite using thin 2 μm absorbing regions. In the imager, the high signal-to-noise ratio contributed to median noise equivalent temperature differences of ∼20 mK for both channels with integration times on the order of 0.5 ms, making it suitable for high speed applications. [reprint (PDF)] |
| 21. | High performance quantum dot-quantum well infrared focal plane arrays S. Tsao, A. Myzaferi, and M. Razeghi SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7605, p. 76050J-1-- January 27, 2010 ...[Visit Journal] Quantum dot (QD) devices are a promising technology for high operating temperature detectors. We have studied InAs QDs embedded in an InGaAs/InAlAs quantum well structure on InP substrate for middle wavelength infrared detectors and focal plane arrays (FPAs). This combined dot-well structure has weak dot confinement of carriers, and as a result, the device behavior differs significantly from that in more common dot systems with stronger confinement. We report on our studies of the energy levels in the QDWIP devices and on QD-based detectors operating at high temperature with D* over 1010 cm·Hz½/W at 150 K operating temperature and high quantum efficiency over 50%. FPAs have been demonstrated operating at up to 200 K. We also studied two methods of adapting the QDWIP device to better accommodate FPA readout circuit limitations. [reprint (PDF)] |
| 21. | Gas Source Molecular Beam Epitaxy Growth and Characterization of Ga0.51In0.49P/InxGa1-xAs/GaAs Modulation-doped Field-effect Transistor Structures C. Besikci, Y. Civan, S. Ozder, O. Sen, C. Jelen, S. Slivken, and M. Razeghi Semiconductor Science Technology 12-- January 1, 1997 ...[Visit Journal] Lattice-matched Ga0.51In0.49P/GaAs and strained Ga0.51In0.49P/InxGa1−xAs/GaAs (0.1 ≤ x ≤ 0.25) modulation-doped field-effect transistor structures were grown by gas source molecular beam epitaxy by using Si as dopant. Detailed electrical characterization results are presented. The Ga0.5In0.49P/In0.25Ga0.75As/GaAs sample yielded dark two-dimensional electron gas densities of 3.75 x 1012 cm-2 (300 K) and 2.3 x 1012 cm-2 (77 K) which are comparable to the highest sheet electron densities reported in AlGaAs/InGaAs/GaAs and InAlAs/InGaAs/InP modulation-doped heterostructures. Persistent photoconductivity was observed in the strained samples only. A 0.797 eV deep level has been detected in the undoped GaInP layers of the structures. Another level, with DLTS peak height dependent on the filling pulse width, has been detected at the interface of the strained samples. Based on the DLTS and Hall effect measurement results, this level, which seems to be the origin of persistent photoconductivity, can be attributed to the strain relaxation related defects. [reprint (PDF)] |
| 21. | Band-gap narrowing and potential fluctuation in Si-doped GaN I.H. Lee, J.J. Lee, P. Kung, F.J. Sanchez, and M. Razeghi Applied Physics Letters 74 (1)-- January 4, 1999 ...[Visit Journal] We investigate the optical properties of two sets of Si-doped GaN epitaxial layers with different degree of compensation. The electron concentration dependence of the band-gap energy measured by photoluminescence is interpreted as band-gap narrowing effect and evaluated by a simple relation. The photoluminescence peak positions of heavily compensated samples are shifted downward with respect to those of moderately compensated samples, and the down shift becomes larger at higher electron density. Based on analysis of photoluminescence spectra, these prominent behaviors are accounted for by band-edge potential fluctuation associated with inhomogeneous residual impurities. [reprint (PDF)] |
| 21. | A lifetime of contributions to the world of semiconductors using the Czochralski invention M. Razeghi Vacuum Vol. 9934, 993406-1-- February 8, 2017 ...[Visit Journal] Over the course of my career, I have made numerous contributions related to semiconductor crystal growth and high performance optoelectronics over a vast region of the electromagnetic spectrum (ultraviolet to terahertz). In 2016 this cumulated in my receiving the Jan Czochralski Gold Medal award from the European Materials Research Society. This article is designed to provide a historical perspective and general overview of these scientific achievements, on the occasion of being honored by this award. These achievements would not have been possible without high quality crystalline substrates, and this article is written in honor of Jan Czochralski on the 100th anniversary of his important discovery. [reprint (PDF)] |
| 21. | Semiconductor ultraviolet detectors M. Razeghi and A. Rogalski Journal of Applied Physics Applied Physics Review 79 (10)-- May 15, 1996 ...[Visit Journal] In this review article a comprehensive analysis of the developments in ultraviolet (UV) detector technology is described. At the beginning, the classification of UV detectors and general requirements imposed on these detectors are presented. Further considerations are restricted to modern semiconductor UV detectors, so the basic theory of photoconductive and photovoltaic detectors is presented in a uniform way convenient for various detector materials. Next, the current state of the art of different types of semiconductor UV detectors is presented. Hitherto, the semiconductor UV detectors have been mainly fabricated using Si. Industries such as the aerospace, automotive, petroleum, and others have continuously provided the impetus pushing the development of fringe technologies which are tolerant of increasingly high temperatures and hostile environments. As a result, the main efforts are currently directed to a new generation of UV detectors fabricated from wide band-gap semiconductors the most promising of which are diamond and AlGaN. The latest progress in development of AlGaN UV detectors is finally described in detail. [reprint (PDF)] |
| 21. | High operability 1024 x 1024 long wavelength Type-II superlattice focal plane array A. Haddadi, S.R. Darvish, G. Chen, A.M. Hoang, B.M. Nguyen and M. Razeghi IEEE Journal of Quantum Electronics (JQE), Vol. 48, No. 2, p. 221-228-- February 10, 2012 ...[Visit Journal] Electrical and radiometric characterization results of a high-operability 1024 x 1024 long wavelength infrared type-II superlattice focal plane array are described. It demonstrates excellent quantum efficiency operability of 95.8% and 97.4% at operating temperatures of 81 K and 68 K, respectively. The external quantum efficiency is 81% without any antireflective coating. The dynamic range is 37 dB at 81 K and increases to 39 dB at 68 K operating temperature. The focal plane array has noise equivalent temperature difference as low as 27 mK and 19 mK at operating temperatures of 81 K and 68 K, respectively, using f/2 optics and an integration time of 0.13 ms. [reprint (PDF)] |
| 21. | Sb-based infrared materials and photodetectors for the 3-5 and 8-12 μm range E. Michel, J.D. Kim, S. Park, J. Xu, I. Ferguson, and M. Razeghi SPIE Photonics West '96 'Photodetectors: Materials and Devices'; Proceedings 2685-- January 27, 1996 ...[Visit Journal] In this paper, we report on the growth of InSb on (100) Si and (111)B GaAs substrates and the growth of InAsSb alloys for longer wavelength applications. The fabrication and characterization of photodetectors based on these materials are also reported. Both photoconductive and photovoltaic devices are investigated. The photodiodes are InSb p-i-n structures and InSb/InAs1-xSbx/InSb double heterostructures grown on (100) and (111)B semi-insulating GaAs and Si substrates by low pressure metalorganic chemical vapor deposition and solid source molecular beam epitaxy. The material parameters for device structures have been optimized through theoretical calculations based on fundamental mechanisms. InSb p-i-n photodiodes with peak responsivities approximately 103 V/W were grown on Si and (111) GaAs substrates. An InAsSb photovoltaic detector with a composition of x equals 0.85 showed photoresponse up to 13 micrometers at 300 K with a peak responsivity of 9.13 X 10-2 V/W at 8 micrometers . The R0A product of InAsSb detectors has been theoretically and experimentally analyzed. [reprint (PDF)] |
| 21. | Widely tunable room temperature semiconductor terahertz source Q. Y. Lu, S. Slivken, N. Bandyopadhyay, Y. Bai, and M. Razeghi Appl. Phys. Lett. 105, 201102-- November 17, 2014 ...[Visit Journal] We present a widely tunable, monolithic terahertz source based on intracavity difference frequency generation within a mid-infrared quantum cascade laser at room temperature. A three-section ridge waveguide laser design with two sampled grating sections and a distributed-Bragg section is used to achieve the terahertz (THz) frequency tuning. Room temperature single mode THz emission with a wide tunable frequency range of 2.6–4.2 THz (∼47% of the central frequency) and THz power up to 0.1 mW is demonstrated, making such device an ideal candidate for THz spectroscopy and sensing. [reprint (PDF)] |
| 21. | Growth and characterization of InP using metalorganic chemical vapor deposition at reduced pressure M. Razeghi, J.P. Duchemin M. Razeghi, J.P. Duchemin, Growth and characterization of InP using metalorganic chemical vapor deposition at reduced pressure, Journal of Crystal Growth, Volume 64, Issue 1, 1983, Pages 76-82,-- November 1, 1983 ...[Visit Journal] M. Razeghi, J.P. Duchemin,
Growth and characterization of InP using metalorganic chemical vapor deposition at reduced pressure,
Journal of Crystal Growth,
Volume 64, Issue 1,
1983,
Pages 76-82, [reprint (PDF)] |
| 21. | Recent Advances in Room Temperature, High-Power Terahertz Quantum Cascade Laser Sources Based on Difference-Frequency Generation Quanyong Lu and Manijeh Razeghi Photonics, 3, 42-- July 7, 2016 ...[Visit Journal] We present the current status of high-performance, compact, THz sources based on intracavity nonlinear frequency generation in mid-infrared quantum cascade lasers. Significant performance improvements of our THz sources in the power and wall plug efficiency are achieved by systematic optimizing the device’s active region, waveguide, and chip bonding strategy. High THz power up to 1.9 mW and 0.014 mW for pulsed mode and continuous wave operations at room temperature are demonstrated, respectively. Even higher power and efficiency are envisioned based on enhancements in outcoupling efficiency and mid-IR performance. Our compact THz device with high power and wide tuning range is highly suitable for imaging, sensing, spectroscopy, medical diagnosis, and many other applications. [reprint (PDF)] |
| 21. | Substrate emission quantum cascade ring lasers with room temperature continuous wave operation Y. Bai, S. Tsao, N. Bandyopadhyay, S. Slivken, Q.Y. Lu, and M. Razeghi SPIE Proceedings, Vol. 8268, p. 82680N-- January 22, 2012 ...[Visit Journal] We demonstrate room temperature, continuous wave operation of quantum cascade ring lasers around 5 μm with single mode operation up to 0.51 W output power. Single mode operation persists up to 0.4 W. Light is coupled out of the ring cavity through the substrate with a second order distributed feedback grating. The substrate emission scheme allows for
epilayer-down bonding, which leads to room temperature continuous wave operation. The far field analysis indicates that the device operates in a high order mode. [reprint (PDF)] |
| 21. | 8-13 μm InAsSb heterojunction photodiode operating at near room temperature J.D. Kim, S. Kim, D. Wu, J. Wojkowski, J. Xu, J. Piotrowski, E. Bigan, and M. Razeghi Applied Physics Letters 67 (18)-- October 30, 1995 ...[Visit Journal] p+-InSb/π-InAs1−xSbx/n+-InSb heterojunction photodiodes operating at near room temperature in the 8–13 μm region of infrared (IR) spectrum are reported. A room‐temperature photovoltaic response of up to 13 μm has been observed at 300 K with an x≊0.85 sample. The voltage responsivity‐area product of 3×10−5 V· cm²/W has been obtained at 300 K for the λ=10.6 μm optimized device. This was close to the theoretical limit set by the Auger mechanism, with a detectivity at room temperature of ≊1.5×108 cm ·Hz½/W. [reprint (PDF)] |
| 21. | Room temperature terahertz semiconductor frequency comb Quanyong Lu, Feihu Wang, Donghai Wu, Steven Slivken & Manijeh Razeghi Nature Communications 10, 2403-- June 3, 2019 ...[Visit Journal] A terahertz (THz) frequency comb capable of high-resolution measurement will significantly
advance THz technology application in spectroscopy, metrology and sensing. The recently
developed cryogenic-cooled THz quantum cascade laser (QCL) comb has exhibited great
potentials with high power and broadband spectrum. Here, we report a room temperature
THz harmonic frequency comb in 2.2 to 3.3 THz based on difference-frequency generation
from a mid-IR QCL. The THz comb is intracavity generated via down-converting a mid-IR
comb with an integrated mid-IR single mode based on distributed-feedback grating without
using external optical elements. The grating Bragg wavelength is largely detuned from the
gain peak to suppress the grating dispersion and support the comb operation in the high gain
spectral range. Multiheterodyne spectroscopy with multiple equally spaced lines by beating it
with a reference Fabry-Pérot comb confirms the THz comb operation. This type of THz comb
will find applications to room temperature chip-based THz spectroscopy. [reprint (PDF)] |
| 21. | Unleashing light: a deep dive into quantum cascade laser dynamics through power, precision, and performance Xiaohan Yu, Yanbo Bai, Feihu Wang, Steve Slivken, Nirajman Shrestha, Ruiming Zhang, Nil Ozcevik, Manijeh Razeghi Proc. SPIE 13908, Quantum Sensing and Nano Electronics and Photonics XXII, 139080U (20 March 2026); https://doi.org/10.1117/12.3082051 ...[Visit Journal] In this study, we explore the complex interplay of structural design and performance metrics in InGaAs/InAlAs/InP ridge waveguide quantum cascade lasers (QCLs) by combining theoretical modeling with rigorous experimental validation. By assuming mirror loss corresponding to a facet reflectivity of R = 0.275, which represents the Fresnel reflectance of uncoated InP facets, we investigated the impact of cavity length on threshold current density and slope efficiency by analyzing Power–Current–Voltage (PIV) characteristics of uncoated QCLs with lengths of 3mm, 4mm, and 5mm. Slope efficiencies were extracted and corrected for single-facet detection.
By leveraging fitting techniques across multiple datasets and laser structure, we quantified internal and external quantum efficiencies and determined the transparency current density using graphical and analytical methods. A linear regression of inverse external efficiency versus inverse mirror loss enabled estimation of the internal quantum efficiency, highlighting the direct influence of fabrication parameters on laser output. With a linear fit of threshold current density versus mirror loss, the transparency current density was calculated.
This work not only reinforces foundational laser physics principles but also provides a hands-on methodology for analyzing active device parameters with practical implications in tunable mid-infrared sources, spectroscopy, and optical sensing. [reprint (PDF)] |
| 21. | III-Nitride Avalanche Photodiodes P. Kung, R. McClintock, J. Pau Vizcaino, K. Minder, C. Bayram and M. Razeghi SPIE Conference, January 25-29, 2007, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices IV, Vol. 6479, p. 64791J-1-12-- January 29, 2007 ...[Visit Journal] Wide bandgap III-Nitride semiconductors are a promising material system for the development of ultraviolet avalanche photodiodes (APDs) that could be a viable alternative to photomultiplier tubes. In this paper, we report the epitaxial growth and physical properties of device quality GaN layers on high quality AlN templates for the first backilluminated GaN p-i-n APD structures on transparent sapphire substrates. Under low bias and linear mode avalanche operation where they exhibited gains near 1500 after undergoing avalanche breakdown. The breakdown electric field in GaN was determined to be 2.73 MV/cm. The hole impact ionization coefficients were shown to be greater than those of electrons. [reprint (PDF)] |
| 21. | Multi-band SWIR-MWIR-LWIR Type-II superlattice based infrared photodetector Manijeh Razeghi, Arash Dehzangi, Jiakai Li Results in Optics Volume 2, January 2021, 100054 https://doi.org/10.1016/j.rio.2021.100054 ...[Visit Journal] Type-II InAs/GaSb superlattices (T2SLs) has drawn a lot of attention since it was introduced in 1970, especially for infrared detection as a system of multi-interacting quantum wells. In recent years, T2SL material system has experienced incredible improvements in material quality, device structure designs and device fabrication process, which elevated the performances of T2SL-based photo-detectors to a comparable level to the state-of-the-art material systems for infrared detection such as Mercury Cadmium Telluride (MCT). As a pioneer in the field, center for quantum devices (CQD) has been involved in growth, design, characterization, and introduction of T2SL material system for infrared photodetection. In this review paper, we will present the latest development of bias-selectable multi-band infrared photodetectors at the CQD, based on InAs/GaSb/AlSb and InAs/InAs1-xSbx type-II superlattice. [reprint (PDF)] |
| 21. | High Performance Quantum Cascade Lasers Grown by Gas-Source Molecular Beam Epitaxy M. Razeghi, S. Slivken, A. Tahraoui and A. Matlis SPIE Conference, San Jose, CA, -- January 22, 2001 ...[Visit Journal] Recent improvements in quantum cascade laser technology have led to a number of very impressive results. This paper is a brief summary of the technological development and state-of- the-art performance of quantum cascade lasers produced at the Center for Quantum Devices. Laser design will be discussed, as well as experimental details of device fabrication. Room temperature QCL operation has been reported for lasers emitting between 5 - 11 μm, with 9 - 11 μm lasers operating up to 425 K. We also demonstrate record room temperature peak output powers at 9 and 11 μm(2.5 W and 1 W respectively) as well as record low 80 K threshold current densities (250 A/cm²) for some laser designs. Finally, some of the current limitations to laser efficiency are mentioned, as well as a means to combat them. [reprint (PDF)] |
| 21. | Avalanche multiplication in AlGaN based solar-blind photodetectors R. McClintock, A. Yasan, K. Minder, P. Kung, and M. Razeghi Applied Physics Letters, 87 (24)-- December 12, 2005 ...[Visit Journal] Avalanche multiplication has been observed in solar-blind AlGaN-based p-i-n photodiodes. Upon ultraviolet illumination, the optical gain shows a soft breakdown starting at relatively low electric fields, eventually saturating without showing a Geiger mode breakdown. The devices achieve a maximum optical gain of 700 at a reverse bias of 60 V. By modeling the device, it is found that this corresponds to an electric-field strength of 1.7 MV/cm. [reprint (PDF)] |
| 21. | Nickel oxide growth on Si (111), c-Al2O3 and FTO/glass by pulsed laser deposition V. E. Sandana ; D. J. Rogers ; F. Hosseini Teherani ; P. Bove ; R. McClintock ; M. Razeghi 03/07/2014-- March 7, 2014 ...[Visit Journal] NiO was grown on Si (111), c-Al2O3 and FTO/glass substrates by pulsed laser deposition (PLD). X-Ray Diffraction (XRD) and scanning electron microscope (SEM) studies revealed that layers grown on c-Al2O3 were fcc NiO with a dense morphology of cubic grains that were strongly (111) oriented along the growth direction. The relatively low ω rocking curve linewidth, of 0.12°suggests that there may have been epitaxial growth on the c-Al2O3 substrate. XRD and SEM indicated that films grown on Si (111) were also fcc NiO, with cubic grains, but that the grain orientation was random. This is consistent with the presence of an amorphous SiO2 layer at the surface of the Si substrate, which precluded epitaxial growth. NiO grown at lower temperature (200°C) on temperature-sensitive FTO/glass substrates showed no evidence of crystallinity in XRD and SEM studies. After flash annealing in air, however, peaks characteristic of randomly oriented fcc NiO appeared in the XRD scans and the surface morphology became more granular in appearance. Such layers appear promising for the development of future dye-sensitised solar cell devices based on NiO grown by PLD. [reprint (PDF)] |
| 21. | Quantum Dot Intersubband Photodetectors C. Jelen, M. Erdtmann, S. Kim, and M. Razeghi SPIE Conference, San Jose, CA, -- January 22, 2001 ...[Visit Journal] Quantum dots are recognized as very promising candidates for the fabrication of intersubband photodetectors in the infrared spectral range. At present, material quality is making rapid progress and some devices have been demonstrated. Examples of mid-infrared quantum dot intersubband photodetectors are presented along with device design and data analysis. Nonetheless, the performance of these devices remains less than comparable quantum well intersubband photodetectors due to difficulties in controlling the quantum dot size and distribution during epitaxy. [reprint (PDF)] |
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