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| 24. | TEG IN LP-MO CVD Ga 0 4 7 ln 0 S3 As-lnP SUPERLATTICE M. RAZEGHIM. A. POISSONJ. P. LARIVAINB. de CREMOUXJ. P. DUCHEMIN ELECTRONICS LETTERs, 1982 ,Vol. 18-- April 15, 1982 ...[Visit Journal] We report the first successful growth of Ga o .4. 7 In 0 . J3 As-InPsuperlattice by the low-pressure metalorganic chemicalvapour deposition technique, and evidence for TEG proper-ties in these structures. [reprint (PDF)] |
| 24. | High performance bias-selectable three-color Short-wave/Mid-wave/Long-wave Infrared Photodetectors based on Type-II InAs/GaSb/AlSb superlattices Anh Minh Hoang, Arash Dehzangi, Sourav Adhikary, & Manijeh Razeghi Nature Scientific Reports 6, Article number: 24144-- April 7, 2016 ...[Visit Journal] We propose a new approach in device architecture to realize bias-selectable three-color shortwave-midwave-longwave infrared photodetectors based on InAs/GaSb/AlSb type-II superlattices. The effect of conduction band off-set and different doping levels between two absorption layers are employed to control the turn-on voltage for individual channels. The optimization of these parameters leads to a successful separation of operation regimes; we demonstrate experimentally three-color photodiodes without using additional terminal contacts. As the applied bias voltage varies, the photodiodes exhibit sequentially the behavior of three different colors, corresponding to the bandgap of three absorbers. Well defined cut-offs and high quantum efficiency in each channel are achieved. Such all-in-one devices also provide the versatility of working as single or dual-band photodetectors at high operating temperature. With this design, by retaining the simplicity in device fabrication, this demonstration opens the prospect for three-color infrared imaging. [reprint (PDF)] |
| 24. | Use of Yttria-Stabilised Zirconia Substrates for Zinc Oxide Mediated Epitaxial Lift-off of Superior Yttria-Stabilised Zirconia Thin Films D. J. Rogers, T. Maroutian, V. E. Sandana, P. Lecoeur, F. H. Teherani, P. Bove and M. Razeghi Proc. of SPIE Vol. 12887, Oxide-based Materials and Devices XV, 128870P 2024, San Francisco),doi: 10.1117/12.3023431 ...[Visit Journal] ZnO layers were grown on (100) and (111) oriented YSZ substrates by pulsed laser deposition (PLD). X-ray diffraction
studies revealed growth of wurtzite ZnO with strong preferential (0002) orientation. The ZnO layer on YSZ (111)
showed distinct Pendellosung fringes and a more pronounced c-axis orientation (rocking curve of 0.08°). Atomic force
microscopy revealed RMS roughnesses of 0.7 and 2.2nm for the ZnO on the YSZ (111) and YSZ (100), respectively.
YSZ was then grown on the ZnO buffered YSZ (111) substrate by PLD. XRD revealed that the YSZ overlayer grew
with a strong preferential (111) orientation. The YSZ/ZnO/YSZ (111) top surface was temporary bonded to an Apiezon
wax carrier and the sample was immersed in 0.1M HCl so as to preferentially etch/dissolve away the ZnO underlayer
and release the YSZ from the substrate. XRD revealed only the characteristic (111) peak of YSZ after lift-off and thus
confirmed both the dissolution of the ZnO and the preservation of the crystallographic integrity of the YSZ on the wax
carrier. Optical and Atomic Force Microscopy revealed some buckling, roughening and cracking of the lifted YSZ,
however. XRD suggested that this may have been due to compressive epitaxial strain release. [reprint (PDF)] |
| 24. | Quantum cascade lasers that emit more light than heat Y. Bai, S. Slivken, S. Kuboya, S.R. Darvish and M. Razeghi Nature Photonics, February 2010, Vol. 4, p. 99-102-- February 1, 2010 ...[Visit Journal] For any semiconductor lasers, the wall plug efficiency, that is, the portion of the injected electrical energy that can be converted into output optical energy, is one of the most important figures of merit. A device with a higher wall plug efficiency has a lower power demand and prolonged device lifetime due to its reduced self-heating. Since its invention, the power performance of the quantum cascade laser has improved tremendously. However, although the internal quantum efficiency can be engineered to be greater than 80% at low temperatures, the wall plug efficiency of a quantum cascade laser has never been demonstrated above 50% at any temperature. The best wall plug efficiency reported to date is 36% at 120 K. Here, we overcome the limiting factors using a single-well injector design and demonstrate 53% wall plug efficiency at 40 K with an emitting wavelength of 5 µm. In other words, we demonstrate a quantum cascade laser that produces more light than heat. [reprint (PDF)] |
| 24. | Low Noise Short Wavelength Infrared Avalanche Photodetector Using SB-Based Strained Layer Superlattice Arash Dehzangi, Jiakai Li, Manijeh Razeghi Photonics 2021, 8(5), 148; https://doi.org/10.3390/photonics8050148 Received: 8 March 2021 / Revised: 12 April 2021 / Accepted: 25 April 2021 / Published: 30 April 2021 ...[Visit Journal] We demonstrate low noise short wavelength infrared (SWIR) Sb-based type II superlattice (T2SL) avalanche photodiodes (APDs). The SWIR GaSb/(AlAsSb/GaSb) APD structure was designed based on impact ionization engineering and grown by molecular beam epitaxy on a GaSb substrate. At room temperature, the device exhibits a 50% cut-off wavelength of 1.74 µm. The device was revealed to have an electron-dominated avalanching mechanism with a gain value of 48 at room temperature. The electron and hole impact ionization coefficients were calculated and compared to give a better prospect of the performance of the device. Low excess noise, as characterized by a carrier ionization ratio of ~0.07, has been achieved. [reprint (PDF)] |
| 24. | Recent Advances in Room Temperature, High-Power Terahertz Quantum Cascade Laser Sources Based on Difference-Frequency Generation Quanyong Lu and Manijeh Razeghi Photonics, 3, 42-- July 7, 2016 ...[Visit Journal] We present the current status of high-performance, compact, THz sources based on intracavity nonlinear frequency generation in mid-infrared quantum cascade lasers. Significant performance improvements of our THz sources in the power and wall plug efficiency are achieved by systematic optimizing the device’s active region, waveguide, and chip bonding strategy. High THz power up to 1.9 mW and 0.014 mW for pulsed mode and continuous wave operations at room temperature are demonstrated, respectively. Even higher power and efficiency are envisioned based on enhancements in outcoupling efficiency and mid-IR performance. Our compact THz device with high power and wide tuning range is highly suitable for imaging, sensing, spectroscopy, medical diagnosis, and many other applications. [reprint (PDF)] |
| 24. | High power, room temperature, Terahertz sources and frequency comb based on Difference frequency generation at CQD Manijeh Razeghi Proc. of SPIE 12230, 1223006, September 2022 ...[Visit Journal] Quantum cascade laser (QCL) is becoming the leading laser source in the mid-infrared and terahertz range due to its rapid development in power, efficiency, and spectral covering range. Owing to its unique intersubband transition and fast carrier lifetime, QCL possesses strong nonlinear susceptibilities that makes it the ideal platform for a variety of nonlinear optical generations. Among this, terahertz (THz) source based on difference-frequency generation (DFG)and frequency comb based on four wave mixing effect are the most exciting phenomena which could potentially revolutionize spectroscopy in mid-infrared (mid-IR) and THz spectral range. In this paper, we will briefly discuss the recent progress of our research. This includes high power high efficiency QCLs, high power room temperature THz sources based on DFG-QCL, room temperature THz frequency comb, and injection locking of high-power QCL frequency combs. The developed QCLs are great candidates as next generation mid-infrared source for spectroscopy and sensing. [reprint (PDF)] |
| 24. | Novel process for direct bonding of GaN onto glass substrates using sacrificial ZnO template layers to chemically lift-off GaN from c-sapphire Rogers, D. J.; Ougazzaden, A.; Sandana, V. E.; Moudakir, T.; Ahaitouf, A.; Teherani, F. Hosseini; Gautier, S.; Goubert, L.; Davidson, I. A.; Prior, K. A.; McClintock, R. P.; Bove, P.; Drouhin, H.-J.; Razeghi, M. Proc. SPIE 8263, Oxide-based Materials and Devices III, 82630R (February 9, 2012)-- February 9, 2012 ...[Visit Journal] GaN was grown on ZnO-buffered c-sapphire (c-Al2O3) substrates by Metal Organic Vapor Phase Epitaxy. The ZnO then served as a sacrificial release layer, allowing chemical lift-off of the GaN from the c-Al2O3 substrate via selective wet etching of the ZnO. The GaN was subsequently direct-wafer-bonded onto a glass substrate. X-Ray Diffraction, Scanning Electron Microscopy, Energy Dispersive X-ray microanalysis, Room Temperature Photoluminescence & optical microscopy confirmed bonding of several mm2 of crack-free wurtzite GaN films onto a soda lime glass microscope slide with no obvious deterioration of the GaN morphology. Using such an approach, InGaN based devices can be lifted-off expensive single crystal substrates and bonded onto supports with a better cost-performance profile. Moreover, the approach offers the possibility of reclaiming and reusing the substrate. [reprint (PDF)] |
| 24. | Comprehensive study of blue and green multi-quantum-well light-emitting diodes grown on conventional and lateral epitaxial overgrowth GaN C. Bayram, J.L. Pau, R. McClintock and M. Razeghi Applied Physics B: Lasers and Optics, Vol. 95, p. 307-314-- November 29, 2008 ...[Visit Journal] Growths of blue and green multi-quantum wells (MQWs) and light-emitting diodes (LEDs) are realized on lateral epitaxial overgrowth (LEO) GaN, and compared with identical structures grown on conventional GaN. Atomic force microscopy is used to confirm the significant reduction of dislocations in the wing region of our LEO samples before active-region growth. Differences between surface morphologies of blue and green MQWs are analyzed. These MQWs are integrated into LEDs. All devices show a blue shift in the electroluminescence (EL) peak and narrowing in EL spectra with increasing injection current, both characteristics attributed to the band-gap renormalization. Green LEDs show a larger EL peak shift and a broader EL spectrum due to larger piezoelectric field and more indium segregation in the MQWs, respectively. Blue LEDs on LEO GaN show a higher performance than those on conventional GaN; however, no performance difference is observed for green LEDs on LEO GaN versus conventional GaN. The performance of the green LEDs is shown to be primarily limited by the active layer growth quality.
[reprint (PDF)] |
| 24. | High-Average-Power, High-Duty-Cycle (~6 μm) Quantum Cascade Lasers S. Slivken, A. Evans, J. David, and M. Razeghi Applied Physics Letters, 81 (23)-- December 2, 2002 ...[Visit Journal] High-power quantum cascade lasers emitting at λ = 6.1 μm are demonstrated. Accurate control of growth parameters and strain balancing results in a near-perfect lattice match, which leads to excellent material quality. Excellent peak power for uncoated lasers, up to 1.5 W per facet for a 21 μm emitter width, is obtained at 300 K for 30 period structures. The threshold current density at 300 K is only 2.4 kA/cm². From 300 to 425 K, the laser exhibits a characteristic temperature T0 of 167 K. Next, Y2O3/Ti/Au mirror coatings were deposited on 1.5 mm cavities and mounted epilayer down. These lasers show an average output power of up to 225 mW at 17% duty cycle, and still show 8 mW average power at 45% duty cycle. [reprint (PDF)] |
| 24. | Microstrip Array Ring FETs with 2D p-Ga2O3 Channels Grown by MOCVD Manijeh Razeghi, Junhee Lee, Lakshay Gautam, Jean-Pierre Leburton, Ferechteh H. Teherani, Pedram Khalili Amiri, Vinayak P. Dravid and Dimitris Pavlidis Photonics 2021, 8(12), 578; ...[Visit Journal] Gallium oxide (Ga2O3) thin films of various thicknesses were grown on sapphire (0001) substrates by metal organic chemical vapor deposition (MOCVD) using trimethylgallium (TMGa), high purity deionized water, and silane (SiH4) as gallium, oxygen, and silicon precursors, respectively. N2 was used as carrier gas. Hall measurements revealed that films grown with a lower VI/III ratio had a dominant p-type conduction with room temperature mobilities up to 7 cm2/Vs and carrier concentrations up to ~1020 cm−3 for thinner layers. High resolution transmission electron microscopy suggested that the layers were mainly κ phase. Microstrip field-effect transistors (FETs) were fabricated using 2D p-type Ga2O3:Si, channels. They achieved a maximum drain current of 2.19 mA and an on/off ratio as high as ~108. A phenomenological model for the p-type conduction was also presented. As the first demonstration of a p-type Ga2O3, this work represents a significant advance which is state of the art, which would allow the fabrication of p-n junction based devices which could be smaller/thinner and bring both cost (more devices/wafer and less growth time) and operating speed (due to miniaturization) advantages. Moreover, the first scaling down to 2D device channels opens the prospect of faster devices and improved heat evacuation [reprint (PDF)] |
| 24. | Advances in mid-infrared detection and imaging: a key issues review Manijeh Razeghi and Binh-Minh Nguyen Rep. Prog. Phys. 77 (2014) 082401-- August 4, 2014 ...[Visit Journal] It has been over 200 years since people recognized the presence of infrared radiation, and developed methods to capture this signal. However, current material systems and technologies for infrared detections have not met the increasing demand for high performance infrared detectors/cameras, with each system having intrinsic drawbacks. Type-II InAs/GaSb superlattice has been recently considered as a promising candidate for the next generation of infrared detection and imaging. Type-II superlattice is a man-made crystal structure, consisting of multiple quantum wells placed next to each other in a controlled way such that adjacent quantum wells can interact. The interaction between multiple quantum wells offers an additional degree of freedom in tailoring the material's properties. Another advantage of type-II superlattice is the experimental benefit of inheriting previous research on material synthesis and device fabrication of bulk semiconductors. It is the combination of these two unique strengths of type-II superlattice—novel physics and easy manipulation—that has enabled unprecedented progress in recent years. In this review, we will describe historical development, and current status of type-II InAs/GaSb superlattice for advanced detection and imaging in the mid-infrared regime (λ = 3–5 µm). [reprint (PDF)] |
| 24. | Modeling of Type-II InAs/GaSb Superlattices Using Empirical Tight-Binding Method and Interface Engineering Y. Wei and M. Razeghi Physical Review B, 69 (8)-- February 15, 2004 ...[Visit Journal] We report the most recent work on the modeling of type-II InAs/GaSb superlattices using the empirical tight binding method in an sp3s* basis. After taking into account the antimony segregation in the InAs layers, the modeling accuracy of the band gap has been improved. Our calculations agree with our experimental results within a certain growth uncertainty. In addition, we introduce the concept of GaxIn1-x type interface engineering in order to reduce the lattice mismatch between the superlattice and the GaSb (001) substrate to improve the overall superlattice material quality. [reprint (PDF)] |
| 24. | Thermal imaging based on high-performance InAs/InP quantum-dot infrared photodetector operating at high temperature M. Razeghi; H. Lim; S. Tsao; H. Seo; W. Zhang Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS.15-16:[4382251] (2007).-- October 21, 2007 ...[Visit Journal] We report a room temperature operating and high-performance InAs quantum-dot infrared photodetector on InP substrate and thermal imaging of 320times256 focal plane array based on this device up to 200 K. [reprint (PDF)] |
| 24. | Recent Advances in InAs/GaSb Superlattices for Very Long Wavelength Infrared Detection G.J. Brown, F. Szmulowicz, K. Mahalingam, S. Houston, Y. Wei, A. Gin and M. Razeghi SPIE Conference, San Jose, CA, Vol. 4999, pp. 457-- January 27, 2003 ...[Visit Journal] New infrared (IR) detector materials with high sensitivity, multi-spectral capability, improved uniformity and lower manufacturing costs are required for numerous long and very long wavelength infrared imaging applications. One materials system has shown great theoretical and, more recently, experimental promise for these applications: InAs/InxGa1-xSb type-II superlattices. In the past few years, excellent results have been obtained on photoconductive and photodiode samples designed for infrared detection beyond 15 microns. The infrared properties of various compositions and designs of these type-II superlattices have been studied. The infrared photoresponse spectra are combined with quantum mechanical modeling of predicted absorption spectra to provide insight into the underlying physics behind the quantum sensing in these materials. Results for superlattice photodiodes with cut-off wavelengths as long as 25 microns are presented. [reprint (PDF)] |
| 24. | Phase-locked, high power, mid-infrared quantum cascade laser array W. Zhou, S. Slivken, and M. Razeghi Applied Physics Letters 112, 181106-- May 4, 2018 ...[Visit Journal] We demonstrate phase-locked, high power quantum cascade laser arrays, which are combined using a monolithic, tree array multimode interferometer, with emission wavelengths around 4.8 μm. A maximum output power of 15 W was achieved from an eight-element laser array, which has only a slightly higher threshold current density and a similar slope efficiency compared to a Fabry-Perot laser of the same length. Calculated multimode interferometer splitting loss is on the order of 0.27 dB for the in-phase supermode. In-phase supermode operation with nearly ideal behavior is demonstrated over the working current range of the array. [reprint (PDF)] |
| 23. | Avalanche multiplication in AlGaN based solar-blind photodetectors R. McClintock, A. Yasan, K. Minder, P. Kung, and M. Razeghi Applied Physics Letters, 87 (24)-- December 12, 2005 ...[Visit Journal] Avalanche multiplication has been observed in solar-blind AlGaN-based p-i-n photodiodes. Upon ultraviolet illumination, the optical gain shows a soft breakdown starting at relatively low electric fields, eventually saturating without showing a Geiger mode breakdown. The devices achieve a maximum optical gain of 700 at a reverse bias of 60 V. By modeling the device, it is found that this corresponds to an electric-field strength of 1.7 MV/cm. [reprint (PDF)] |
| 23. | Active and passive infrared imager based on short-wave and mid-wave type-II superlattice dual-band detectors E.K. Huang, A. Haddadi, G. Chen, A.M. Hoang, and M. Razeghi Optics Letters, Vol. 38, no. 1, p. 22-24-- January 1, 2013 ...[Visit Journal] A versatile dual-band detector capable of active and passive use is demonstrated using short-wave (SW) and midwave(MW) IR type-II superlattice photodiodes. A bilayer etch-stop scheme is introduced for back-side-illuminated detectors, which enhanced the external quantum efficiency both in the SWIR and MWIR spectral regions. Temperature-dependent dark current measurements of pixel-sized 27 μm detectors found the dark current density
to be ~1 × 10-5 A/cm² for the ∼4.2 μm cutoff MWIR channel at 140 K. This corresponded to a reasonable imager noise equivalent difference in temperature of ∼49 mK using F∕2.3 optics and a 10 ms integration time (tint), which lowered to ∼13 mK at 110 K using tint 30 ms, illustrating the potential for high-temperature operation. The SWIR channel was found to be limited by readout noise below 150 K. Excellent imagery from the dual-band imager exemplifying pixel coincidence is shown. [reprint (PDF)] |
| 23. | Techniques for High-Quality SiO2 Films J. Nguyen and M. Razeghi SPIE Conference, January 25-29, 2007, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices IV, Vol. 6479, p. 64791K-1-8-- January 29, 2007 ...[Visit Journal] We report on the comparison of optical, structural, and electrical properties of SiO2 using plasma-enhanced chemical vapor deposition and ion-beam sputtering deposition. High-quality, low-temperature deposition of SiO2 by ion-beam sputtering deposition is shown to have lower absorption, smoother and more densely packed films, a lower amount of fixed oxide charges, and a lower trapped-interface density than SiO2 by plasma-enhanced chemical vapor deposition. This high-quality SiO2 is then demonstrated as an excellent electrical and mechanical surface passivation layer on Type-II InAs/GaSb photodetectors [reprint (PDF)] |
| 23. | Short Wavelength (λ~ 4.3 μm) High-Performance Continuous-Wave Quantum-Cascade Lasers J.S. Yu, A. Evans, S. Slivken, S.R. Darvish, and M. Razeghi IEEE Photonics Technology Letters, 17 (6)-- June 1, 2005 ...[Visit Journal] We report continuous-wave (CW) operation of a 4.3-μm quantum-cascade laser from 80 K to 313 K. For a high-reflectivity-coated 11-μm-wide and 4-mm-long laser, CW output powers of 1.34 W at 80 K and 26 mW at 313 K are achieved. At 298 K, the CW threshold current density of 1.5 kA/cm2 is observed with a CW output power of 166 mW and maximum wall-plug efficiency of 1.47%. The CW emission wavelength varies from 4.15 μm at 80 K to 4.34 μm at 298 K, corresponding to a temperature-tuning rate of 0.87 nm/K. The beam full-width at half-maximum values for the parallel and the perpendicular far-field patterns are 26° and 49° in CW mode, respectively. [reprint (PDF)] |
| 23. | High Performance Type-II InAs/GaSb Superlattice Photodiodes H. Mohseni, Y. Wei, and M. Razeghi SPIE Conference, San Jose, CA, -- January 22, 2001 ...[Visit Journal] We report on the demonstration of high performance p-i-n photodiodes based on Type-II InAs/GaSb superlattices operating in the very long wavelength infrared (VLWIR) range at 80 K. Material is grown by molecular beam epitaxy on GaSb substrates with excellent crystal quality as evidenced by x-ray diffraction and atomic force microscopy. The processed devices with a 50% cutoff wavelength of λc equals 22 μm show a peak current responsivity about 5.5 A/W at 80 K. The use of binary layers in the superlattice has significantly enhanced the uniformity and reproducibility of the energy gap. The 90% to 10% cut-off energy width of these devices is on the order of 2 kT which is about four times smaller compared to the devices based on InAs/Ga1-xInxSb superlattices. Similar photovoltaic devices with cut-off wavelengths up to 25 μm have been measured at 80 K. Our experimental results shows excellent uniformity over a three inch wafer area, indicating the possibility of VLWIR focal plane arrays based on Type-II superlattices. [reprint (PDF)] |
| 23. | High performance photodiodes based on InAs/InAsSb type-II superlattices for very long wavelength infrared detection A. M. Hoang, G. Chen, R. Chevallier, A. Haddadi, and M. Razeghi Appl. Phys. Lett. 104, 251105 (2014)-- June 23, 2014 ...[Visit Journal] Very long wavelength infrared photodetectors based on InAs/InAsSb Type-II superlattices are demonstrated on GaSb substrate. A heterostructure photodiode was grown with 50% cut-off wavelength of 14.6 μm. At 77 K, the photodiode exhibited a peak responsivity of 4.8 A/W, corresponding to a quantum efficiency of 46% at −300 mV bias voltage from front side illumination without antireflective coating. With the dark current density of 0.7 A/cm², it provided a specific detectivity of 1.4 × 1010 Jones. The device performance was investigated as a function of operating temperature, revealing a very stable optical response and a background limited performance below 50 K. [reprint (PDF)] |
| 23. | High power continuous operation of a widely tunable quantum cascade laser with an integrated amplifier S. Slivken, S. Sengupta, and M. Razeghi Applied Physics Letters 107, 251101-- December 21, 2015 ...[Visit Journal] Wide electrical tuning and high continuous output power is demonstrated from a single mode quantum cascade laser emitting at a wavelength near 4.8 μm. This is achieved in a space efficient manner by integrating an asymmetric sampled grating distributed feedback tunable laser with an optical amplifier. An initial demonstration of high peak power operation in pulsed mode is demonstrated first, with >5 W output over a 270 nm (113 cm−1) spectral range. Refinement of the geometry leads to continuous operation with a single mode spectral coverage of 300 nm (120 cm−1) and a maximum continuous power of 1.25 W. The output beam is shown to be nearly diffraction-limited, even at high amplifier current. [reprint (PDF)] |
| 23. | A lifetime of contributions to the world of semiconductors using the Czochralski invention M. Razeghi Vacuum Vol. 9934, 993406-1-- February 8, 2017 ...[Visit Journal] Over the course of my career, I have made numerous contributions related to semiconductor crystal growth and high performance optoelectronics over a vast region of the electromagnetic spectrum (ultraviolet to terahertz). In 2016 this cumulated in my receiving the Jan Czochralski Gold Medal award from the European Materials Research Society. This article is designed to provide a historical perspective and general overview of these scientific achievements, on the occasion of being honored by this award. These achievements would not have been possible without high quality crystalline substrates, and this article is written in honor of Jan Czochralski on the 100th anniversary of his important discovery. [reprint (PDF)] |
| 23. | Widely tuned room temperature terahertz quantum cascade laser sources based on difference-frequency generation Q.Y. Lu, N. Bandyopadhyay, S. Slivken, Y. Bai and M. Razeghi Applied Physics Letters, Vol. 101, No. 25, p. 251121-1-- December 17, 2012 ...[Visit Journal] We demonstrate room temperature THz quantum cascade laser sources with a broad spectral coverage based on intracavity difference-frequency generation. Two mid-infrared active cores based on the single-phonon resonance scheme are designed with a THz nonlinearity specially optimized at the high operating fields that correspond to the highest mid-infrared output powers. A Čerenkov phase-matching scheme along with integrated dual-period distributed feedback gratings are used for efficient THz extraction and spectral purification. Single mode emissions from 1.0 to 4.6 THz with a side-mode suppression ratio and output power up to 40 dB and 32 μW are obtained, respectively. [reprint (PDF)] |
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