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13.  Capacitance-voltage investigation of high purity InAs/GaSb superlattice photodiodes
A. Hood, D. Hoffman, Y. Wei, F. Fuchs, and M. Razeghi
Applied Physics Letters 88 (6)-- February 6, 2006 ...[Visit Journal]
The residual carrier backgrounds of binary type-II InAs/GaSb superlattice photodiodes with cutoff wavelengths around 5 μm have been studied in the temperature range between 20 and 200 K. By applying a capacitance-voltage measurement technique, a residual background concentration below 1015 cm–3 has been found. [reprint (PDF)]
 
13.  Very Long Wavelength Infrared Type-II Detectors Operating at 80K
H. Mohseni, A. Tahraoui, J. Wojkowski, M. Razeghi, G.J. Brown, W.C. Mitchel, and Y.S. Park
Applied Physics Letters 77 (11)-- September 11, 2000 ...[Visit Journal]
We report a demonstration of very long wavelength infrared detectors based on InAs/GaSb superlattices operating at T = 80 K. Detector structures with excellent material quality were grown on an optimized GaSb buffer layer on GaAs semi-insulating substrates. Photoconductive devices with 50% cutoff wavelength of λc = 17  μm showed a peak responsivity of about 100 mA/W at T = 80  K. Devices with 50% cutoff wavelengths up to λc = 22  μm were demonstrated at this temperature. Good uniformity was obtained over large areas even for the devices with very long cutoff wavelengths. [reprint (PDF)]
 
13.  Sensitive detection of CO and N2O using a high power CW 4.61 μm dfb-QCL based QEPAS sensor
Yufei Ma; Rafał Lewicki; Manijeh Razeghi; Xin Yu; Frank K. Tittel
CLEO: Science and Innovations, CLEO_SI 2013. 2013:JW2A.80-- June 9, 2013 ...[Visit Journal]
A high power CW DFB-QCL based CO and N2O QEPAS sensor demonstrating the MDL of 1.5 ppbv and 23 ppbv, respectively was developed. Continuous monitoring of atmospheric CO and N2O concentration levels were performed. [reprint (PDF)]
 
13.  Current status and potential of high power mid-infrared intersubband lasers
S. Slivken, Y. Bai, B. Gokden, S.R. Darvish and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 76080B-1-- January 22, 2010 ...[Visit Journal]
Some of the recent advances in high power quantum cascade laser development will be reviewed in this paper. Research areas explored include short wavelength (λ <4 µm) lasers, high performance strain-balanced heterostructures, and high power long wavelength (7< λ< 16 µm) lasers. Near λ=4.5 µm, highlights include demonstration of 18% continuous wave wallplug efficiency at room temperature, 53% pulsed wallplug efficiency at 40 K, and 120 W of peak power output from a single device at room temperature. Near λ ~10 µm, up to 0.6 W of continuous output power at room temperature has also been demonstrated, with pulsed efficiencies up to 9%. [reprint (PDF)]
 
13.  Type-II Antimonide-based Superlattices for the Third Generation Infrared Focal Plane Arrays
Manijeh Razeghi, Edward Kwei-wei Huang, Binh-Minh Nguyen, Siamak Abdollahi Pour, and Pierre-Yves Delaunay
SPIE Proceedings, Infrared Technology and Applications XXXVI, Vol. 7660, pp. 76601F-- May 10, 2010 ...[Visit Journal]
In recent years, the Type-II superlattice (T2SL) material platform has seen incredible growth in the understanding of its material properties which has lead to unprecedented development in the arena of device design. Its versatility in band-structure engineering is perhaps one of the greatest hallmarks of the T2SL that other material platforms are lacking. In this paper, we discuss advantages of the T2SL, specifically the M-structure T2SL, which incorporates AlSb in the traditional InAs/GaSb superlattice. Using the M-structure, we present a new unipolar minority electron detector coined as the p-M-p, the letters which describe the composition of the device. Demonstration of this device structure with a 14 μm cutoff attained a detectivity of 4x1010 Jones (-50 mV) at 77 K. As device performance improves year after year with novel design contributions from the many researchers in this field, the natural progression in further enabling the ubiquitous use of this technology is to reduce cost and support the fabrication of large infrared imagers. In this paper, we also discuss the use of GaAs substrates as an enabling technology for third generation imaging on T2SLs. Despite the 7.8% lattice mismatch between the native GaSb and alternative GaAs substrates, T2SL photodiodes grown on GaAs at the MWIR and LWIR have been demonstrated at an operating temperature of 77 K [reprint (PDF)]
 
13.  Noise performance of InGaAs/InP quantum well infrared photodetectors
C. Jelen, S. Slivken, T. David, M. Razeghi and G. J. Brown
IEEE Journal of Quantum Electronics 34 (7)-- July 7, 1998
Dark current noise measurements were carried out between 10 and 10(4) Hz at T = 80 K on two InGaAs-InP quantum-well infrared photodetectors (QWIP's) designed for 8-mu m infrared (IR) detection. Using the measured noise data, we have calculated the thermal generation rate, bias-dependant gain, electron trapping probability, and electron diffusion length. The calculated thermal generation rate (similar to 7 x 10(22) cm(-3) s(-1)) is similar to AlGaAs-GaAs QWIP's with similar peak wavelengths, but the gain is 50x larger, indicating improved transport and carrier lifetime are obtained in the binary InP barriers. [reprint (PDF)]
 
13.  Solar-blind photodetectors based on Ga2O3 and III-nitrides
Ryan McClintock; Alexandre Jaud; Lakshay Gautam; Manijeh Razeghi
Proc. SPIE 11288, Quantum Sensing and Nano Electronics and Photonics XVII, 1128803-- January 31, 2020 ...[Visit Journal]
Recently, there has been a surge of interest in the wide bandgap semiconductors for solar blind photo detectors (SBPD). This work presents our recent progress in the growth/doping of AlGaN and Ga2O3 thin films for solar blind detection applications. Both of these thin films grown are grown by metal organic chemical vapor deposition (MOCVD) in the same Aixtron MOCVD system. Solar-blind metal-semiconductor-metal photodetectors were fabricated with Ga2O3. Spectral responsivity studies of the MSM photodetectors revealed a peak at 261 nm and a maximum EQE of 41.7% for a −2.5 V bias. We have also demonstrated AlGaN based solar-blind avalanche photodiodes with a gain in excess of 57,000 at ~100 volts of reverse bias. This gain can be attributed to avalanche multiplication of the photogenerated carriers within the device. Both of these devices show the potential of wide bandgap semiconductors for solar blind photo detectors. [reprint (PDF)]
 
13.  Photoluminescence Study of AlGaN-based 280 nm Ultraviolet Light-Emitting Diodes
A. Yasan, R. McClintock, K. Mayes, D.H. Kim, P. Kung, and M. Razeghi
Applied Physics Letters, 83 (20)-- November 17, 2003 ...[Visit Journal]
We investigated optical properties of single quantum well AlGaN-based UV 280 nm light-emitting diodes using temperature-dependent photoluminescence (PL) measurement. We found an "S-shaped" temperature dependence of the peak energy. From the Arrhenius plot of integrated PL intensity, we speculate that dislocations as well as thermal emission of carriers out of the quantum well are responsible for the PL quenching behavior. Also a second nonradiative channel with much lower activation energy was found, the origin of which we believe to be quenching of the bound excitons [reprint (PDF)]
 
13.  Quantum-Cascade Lasers Operating in Continuous-Wave Mode Above 90°C at λ ~5.25 µm
A. Evans, J. Nguyen, S. Slivken, J.S. Yu, S.R. Darvish, and M. Razeghi
Applied Physics Letters 88 (5)-- January 30, 2006 ...[Visit Journal]
We report on the design and fabrication of λ~5.25 μm quantum-cascade lasers (QCLs) for very high temperature continuous-wave (CW) operation. CW operation is reported up to a maximum temperature of 90 °C (363 K). CW output power is reported in excess of 500 mW near room temperature with a low threshold current density. A finite element thermal model is used to investigate the Gth and maximum CW operating temperature of the QCLs. [reprint (PDF)]
 
13.  Effects of well width and growth temperature on optical and structural characteristics of AlN/GaN superlattices grown by metal-organic chemical vapor deposition
C. Bayram, N. Pere-Laperne, and M. Razeghi
Applied Physics Letters, Vol. 95, No. 20, p. 201906-1-- November 16, 2009 ...[Visit Journal]
AlN/GaN superlattices (SLs) employing various well widths (from 1.5 to 7.0 nm) are grown by metal-organic chemical vapor deposition technique at various growth temperatures (Ts) (from 900 to 1035 °C). The photoluminescence (PL), x-ray diffraction, and intersubband (ISB) absorption characteristics of these SLs and their dependency on well width and growth temperature are investigated. Superlattices with thinner wells (grown at the same Ts) or grown at lower Ts (employing the same well width) are shown to demonstrate higher strain effects leading to a higher PL energy and ISB absorption energy. Simulations are employed to explain the experimental observations. ISB absorptions from 1.04 to 2.15 µm are demonstrated via controlling well width and growth temperature. [reprint (PDF)]
 
13.  First room‐temperature cw operation of a GaInAsP/InP light‐emitting diode on a silicon substrate
M. Razeghi; R. Blondeau; M. Defour; F. Omnes; P. Maurel; F. Brillouet
Appl. Phys. Lett. 53, 854–855 (1988)-- July 4, 1988 ...[Visit Journal]
We report in this letter the first successful fabrication of an InP-GalnAsP light-emitting diode, emitting at 1.15 pm grown by low-pressure metalorganic chemical vapor deposition on a silicon substrate. The device has been operated under continuous wave operation at room temperature for 24 h (with an injection current of 200 rnA), and showed no degradation. [reprint (PDF)]
 
13.  High Power 3-12 μm Infrared Lasers: Recent Improvements and Future Trends
M. Razeghi, S. Slivken, A. Tahraoui, A. Matlis, and Y.S. Park
Physica E: Low-Dimensional Systems and Nanostructures 11 (2-3)-- October 1, 2001 ...[Visit Journal]
In this paper, we discuss the progress of quantum cascade lasers (QCLs) grown by gas-source molecular beam epitaxy. Room temperature QCL operation has been reported for lasers emitting between 5-11 μm, with 9-11 μm lasers operating up to 425 K. Laser technology for the 3-5 μm range takes advantage of a strain-balanced active layer design. We also demonstrate record room temperature peak output powers at 9 and 11 μm (2.5 and 1 W, respectively) as well as record low 80K threshold current densities (250 A/cm²) for some laser designs. Preliminary distributed feedback (DFB) results are also presented and exhibit single mode operation for 9 μm lasers at room temperature. [reprint (PDF)]
 
13.  Advances in UV sensitive visible blind GaN-based APDs
M. Ulmer, R. McClintock and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-27, 2011), Vol. 7945, p. 79451G-- January 23, 2011 ...[Visit Journal]
In this paper, we describe our current state-of-the-art process of making visible-blind APDs based on GaN. We have grown our material on both conventional sapphire and low dislocation density free-standing c- and m-plane GaN substrates. Leakage current, gain, and single photon detection efficiency (SPDE) of these APDs are compared. The spectral response and Geiger-mode photon counting performance of UV APDs are studied under low photon fluxes. Single photon detection capabilities with over 30% are demonstrated. We show how with pulse height discrimination the Geiger-mode operation conditions can be optimized for enhanced SPDE versus dark counts. [reprint (PDF)]
 
13.  Responsivity and Noise Performance of InGaAs/InP Quantum Well Infrared Photodetectors
C. Jelen, S. Slivken, T. David, G. Brown, and M. Razeghi
SPIE Conference, San Jose, CA, -- January 28, 1998 ...[Visit Journal]
Dark current nose measurements were carried out between 10 and 104 Hz at T = 80K on two InGaAs/InP quantum well IR photo detectors (QWIPs) designed for 8 μm IR detection. Using the measured noise data, we have calculated the thermal generation rate, bias-dependent gain, electron trapping probability, and electron diffusion length. The calculated thermal generation rate is similar to AlGaAs/GaAs QWIPs with similar peak wavelengths, but the gain is 50X larger, indicating improved transport and carrier lifetime are obtained in the binary InP barriers. As a result, a large responsivity of 7.5 A/W at 5V bias and detectivity of 5 X 1011 cm·Hz½/W at 1.2 V bias were measured for the InGaAs/InP QWIPs at T = 80K. [reprint (PDF)]
 
13.  Growth of Ga0.47In0.53As‐InP quantum wells by low pressure metalorganic chemical vapor deposition
M. Razeghi; J. P. Hirtz; U. O. Ziemelis; C. Delalande; B. Etienne; M. Voos
Appl. Phys. Lett. 43, 585–587 (1983)-- September 15, 1983 ...[Visit Journal]
We describe the growth of multiquantum well and single quantum well Ga0 ,47 InOS3 As-InP structures by low pressure metalorganic chemical vapor deposition. The multi well structure consists of 2S-, SO-, 100-, and 200-A quantum wells (Ga0 ,47 InOS3 As layers) separated by SOO-A barriers (InP layers). Auger measurements indicate the presence offour distinct wells with abrupt boundaries. Photoluminescence measurements are consistent with the existence of four wells; however, deviations are noted between experimentally determined and theoretically predicted recombination energies. An analogous situation exists for the single (SO and 100 A) quantum well structures. Possible explanations, including variation of well composition, variation of well thickness, and participation of impurities in the recombination process are suggested. [reprint (PDF)]
 
13.  Hybrid green LEDs with n-type ZnO substituted for N-type GaN in an inverted P-N junction
F. Hosseini Teherani; M. Razeghi; D.J. Rogers; Can Bayram; R. McClintock
LEOS Annual Meeting Conference Proceedings, LEOS '09. IEEE, [5343231] (2009) -- October 4, 2009 ...[Visit Journal]
Recently, the GaN and ZnO materials systems have attracted considerable attention because of their use in a broad range of emerging applications including light-emitting diodes (LEDs) and solar cells. GaN and ZnO are similar materials with direct wide bandgaps, wurtzite crystal structure, high thermal stability and comparable thermal expansion coefficients, which makes them well suited for heterojunction fabrication. Two important advantages of GaN over ZnO are the reliable p-type doping and the mature know-how for bandgap engineering. Thus GaN-based LEDs can be made to emit from the deep UV right into the green through alloying with Al and In, respectively. The performance is not identical at all wavelengths, however, and the performance of InGaN-based green LEDs is still relatively poor. [reprint (PDF)]
 
13.  Scale-up of the Chemical Lift-off of (In)GaN-based p-i-n Junctions from Sapphire Substrates Using Sacrificial ZnO Template Layers
D. J. Rogers, S. Sundaram, Y. El Gmili, F. Hosseini Teherani, P. Bove, V. Sandana, P. L. Voss, A. Ougazzaden, A. Rajan, K.A. Prior, R. McClintock, & M. Razeghi
Proc. SPIE 9364, Oxide-based Materials and Devices VI, 936424 -- March 24, 2015 ...[Visit Journal]
(In)GaN p-i-n structures were grown by MOVPE on both GaN- and ZnO-coated c-sapphire substrates. XRD studies of the as-grown layers revealed that a strongly c-axis oriented wurtzite crystal structure was obtained on both templates and that there was a slight compressive strain in the ZnO underlayer which increased after GaN overgrowth. The InGaN peak position gave an estimate of 13.6at% for the indium content in the active layer. SEM and AFM revealed that the top surface morphologies were similar for both substrates, with an RMS roughness (5 μm x 5 μm) of about 10 nm. Granularity appeared slightly coarser (40nm for the device grown on ZnO vs 30nm for the device grown on the GaN template) however. CL revealed a weaker GaN near band edge UV emission peak and a stronger broad defect-related visible emission band for the structure grown on the GaN template. Only a strong ZnO NBE UV emission was observed for the sample grown on the ZnO template. Quarter-wafer chemical lift-off (CLO) of the InGaN-based p-i-n structures from the sapphire substrate was achieved by temporary-bonding the GaN surface to rigid glass support with wax and then selectively dissolving the ZnO in 0.1M HCl. XRD studies revealed that the epitaxial nature and strong preferential c-axis orientation of the layers had been maintained after lift-off. This demonstration of CLO scale-up, without compromising the crystallographic integrity of the (In)GaN p-i-n structure opens up the perspective of transferring GaN based devices off of sapphire substrates industrially. [reprint (PDF)]
 
13.  Growth and characterization of InSbBi for long wavelength infrared photodetectors
J.J. Lee, J.D. Kim, and M. Razeghi
Applied Physics Letters 70 (24)-- June 16, 1997 ...[Visit Journal]
The epitaxial growth of InSbBi ternary alloys by low-pressure metalorganic chemical vapor deposition is reported on. X-ray diffraction spectra showed well resolved peaks of InSbBi and InSb films. Bi incorporation was confirmed by energy dispersive x-ray analysis. Photoresponse spectrum up to 9.3 μm which corresponds to 0.13 eV energy band gap has been measured in a sample with Bi composition of 5.8 at.% at 77 K. Electron mobility at room temperature ranges from 44 100 to 4910 cm²/V·s as Bi composition increases. [reprint (PDF)]
 
13.  High quality LEO growth and characterization of GaN films on Al2O3 and Si substrates
M. Razeghi, P. Kung, D. Walker, M. Hamilton, and J. Diaz
SPIE International Conference on Solid State Crystals, Zakopane, Poland; Proceedings 3725-- October 12, 1998 ...[Visit Journal]
We report the lateral epitaxial overgrowth (LEO) of GaN films on (00.1) Al2O3 and (111) Si substrates by metalorganic chemical vapor deposition. The LEO on Si substrates was possible after achieving quasi monocrystalline GaN template films on (111) Si substrates. X-ray diffraction, photoluminescence, scanning electron microscopy and atomic force microscopy were used to assess the quality of the LEO films. Lateral growth rates more than 5 times as high as vertical growth rates were achieved for both LEO growths of GaN on sapphire and silicon substrates. [reprint (PDF)]
 
13.  High‐quality GaAs/Ga0.49In0.51P superlattices grown on GaAs and silicon substrates by low‐pressure metalorganic chemical vapor deposition Available
M. Razeghi; Ph. Maurel; F. Omnes; M. Defour; C. Boothroyd; W. M. Stobbs; M. Kelly
J. Appl. Phys. 63, 4511–4514 (1988) -- May 1, 1988 ...[Visit Journal]
We report the successful growth of Ga0.49 Iuo.5 ! P-GaAs superlattices on GaAs and Si substrates by low-pressure metalorganic chemical vapor deposition. The high quality of the structure grown on GaAs and silicon substrates has been evidenced by transmission electron microscopy photographs, that show very sharp interfaces between GaAs wells and Gao.49InO.51 P barriers, with perfect control of thicknesses and compositions. Classical Hall measurements performed on the sample further demonstrated the presence of a twodimensional electron ga.<; with a mobility at T = 4 K , fL (4 K) = 50000 cm2 1V Is, and a carrier concentration n _ (4 K) = 2,9 X 1011 em -2. GaAs/Gao.49 InO. 51 P superlattices have been used, as well as buffer layer in order to grow GaAs on silicon substrates. Mirrorlike single-crystal GaAs has thus been obtained. A GaInP IGaAs heterostructure with electron HaH mobility as high as 6000 cm2 /V Is at 300 K and 80000 cm2 /V Is at 4 K has been grown, which is the highest mobility that has yet been reported for these materials, [reprint (PDF)]
 
13.  Noise analysis in type-II InAs/GaSb focal plane arrays
P.Y. Delaunay and M. Razeghi
Journal of Applied Physics, Vol. 106, Issue 6, p. 063110-- September 15, 2009 ...[Visit Journal]
A long wavelength infrared focal plane array based on type-II InAs/GaSb superlattices was fabricated and characterized at 80 K. The noise equivalent temperature difference in the array was measured as low as 23 mK for an integration time of 0.129 ms. The noise behavior of the detectors was properly described by a model based on thermal, shot, read out integrated circuit, and photon noises. The noise of the imager was dominated by photon noise for photon fluxes higher than 1.8×1015 ph·s−1·cm−2. At lower irradiance, the imager was limited by the shot noise generated by the dark current or the noise of the testing system. The superlattice detector did not create 1/f noise for frequencies above 4 mHz. As a result, the focal plane array did not require frequent calibrations. [reprint (PDF)]
 
13.  GaInAsP/InP 1.35 μm Double Heterostructure Laser Grown on Silicon Substrate by Metalorganic Chemical Vapor Deposition
K. Mobarhan, C. Jelen, E. Kolev, and M. Razeghi
Journal of Applied Physics 74 (1)-- July 1, 1993 ...[Visit Journal]
A 1.35 μm GaInAsP/InP double heterostructure laser has been grown on a Si substrate using low‐pressure metalorganic chemical vapor deposition. This was done without the use of a superlattice layer or a very thick InP buffer layer, which are used to prevent the dislocations from spreading into the active layer. Pulsed operation with output power of over 200 mW per facet was achieved at room temperature for broad area lasers with 20 μm width and 170 μm cavity length. The threshold current density of a 350 μm cavity length device was 9.8 kA/cm². The characteristic temperature was 66 K. [reprint (PDF)]
 
13.  High power photonic crystal distributed feedback quantum cascade lasers emitting at 4.5 micron
B. Gokden, S. Slivken and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 760806-1-- January 22, 2010 ...[Visit Journal]
Quantum cascade lasers possess very small linewidth enhancement factor, which makes them very prominent candidates for realization of high power, nearly diffraction limited and single mode photonic crystal distributed feedback broad area lasers in the mid-infrared frequencies. In this paper, we present room temperature operation of a two dimensional photonic crystal distributed feedback quantum cascade laser emitting at 4.5 µm. peak power up to ~0.9 W per facet is obtained from a 2 mm long laser with 100 µm cavity width at room temperature. The observed spectrum is single mode with a very narrow linewidth. Far-field profile has nearly diffraction limited single lobe with full width at half maximum of 3.5 degree normal to the facet. The mode selection and power output relationships are experimentally established with respect to different cavity lengths for photonic crystal distributed feedback quantum cascade lasers. [reprint (PDF)]
 
13.  Schottky barrier heights and conduction-band offsets of In1-xGaxAs1-yPy lattice matched to GaAs
J.K. Lee, Y.H. Cho, B.D. Choe, K.S. Kim, H.I. Jeon, H. Lim and M. Razeghi
Applied Physics Letters 71 (7)-- August 18, 1997 ...[Visit Journal]
The Schottky barrier heights of Au/In1−xGaxAs1−yPy contacts have been determined as a function of y by the capacitance–voltage and temperature dependent current–voltage characteristics measurements. The barrier height is observed to increase as y is increased for both n- and p-type materials, with a more rapid increase for the p-type material. The compositional variation of the barrier heights for Au/n-In1−xGaxAs1−yPy is found to be identical to that of the conduction-band offsets in In1−xGaxAs1−yPy/GaAs heterojunctions. A possible cause of this phenomenon is also discussed. [reprint (PDF)]
 
13.  Room-temperature, high-power and continuous-wave operation of distributed-feedback quantum-cascade lasers at λ ~ 9.6 µm
S.R. Darvish, S. Slivken, A. Evans, J.S. Yu, and M. Razeghi
Applied Physics Letters, 88 (20)-- May 15, 2006 ...[Visit Journal]
High-power continuous-wave (cw) operation of distributed-feedback quantum-cascade lasers is reported. Continuous-wave output powers of 100 mW at 25 °C and 20 mW at 50 °C are obtained. The device exhibits a cw threshold current density of 1.34 kA/cm2, a maximum cw wall-plug efficiency of 1% at 25 °C, and a characteristic temperature of ~190 K in pulsed mode. Single-mode emission near 9.6 μm with a side-mode suppression ratio of ≥ 30 dB and a tuning range of 2.89 cm–1 from 15 to 50 °C is obtained. [reprint (PDF)]
 

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