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| 24. | Recent advances of terahertz quantum cascade lasers Manijeh Razeghi Proc. SPIE 8119, Terahertz Emitters, Receivers, and Applications II, 81190D (September 07, 2011)-- November 7, 2011 ...[Visit Journal] In the past decade, tremendous development has been made in GaAs/AlGaAs based THz quantum cascade laser (QCLs), however, the maximum operating temperature is still limited below 200 K (without magnetic field). THz QCL based on difference frequency generation (DFG) represents a viable technology for room temperature operation. Recently, we have demonstrated room temperature THz emission (∼ 4 THz) up to 8.5 μW with a power conversion efficiency of 10 μW/W². A dual-period distributed feedback grating is used to filter the mid-infrared spectra in favor of an extremely narrow THz linewidth of 6.6 GHz. [reprint (PDF)] |
| 24. | Optical Coatings by ion-beam sputtering deposition for long-wave infrared quantum cascade lasers J. Nguyen, J.S. Yu, A. Evans, S. Slivken and M. Razeghi Applied Physics Letters, 89 (11)-- September 11, 2006 ...[Visit Journal] The authors report on the development of high-reflection and multilayer antireflection coatings using ion-beam sputtering deposition for long-wave infrared (λ~9.4 μm) quantum cascade lasers. A metallic high-reflection coating structure using Y2O3 and Au is demonstrated to achieve a high reflectance of 96.70%, and the use of a multilayer anti-reflection coating structure using PbTe and ZnO is demonstrated to achieve a very low reflectance of 1.64%. [reprint (PDF)] |
| 24. | Comparison of Trimethylgallium and Triethylgallium for the Growth of GaN A. Saxler, D. Walker, P. Kung, X. Zhang, M. Razeghi, J. Solomon, W. Mitchel, and H.R. Vydyanath Applied Physics Letters 71 (22)-- December 1, 1997 ...[Visit Journal] GaN films grown by low-pressure metalorganic chemical vapor deposition using trimethylgallium and triethylgallium as gallium precursors are compared. The films were characterized by x-ray diffraction, Hall effect, photoluminescence, secondary ion mass spectroscopy, and etch pit density measurements. GaN layers grown using triethylgallium exhibited superior electrical and optical properties and a lower carbon impurity concentration. [reprint (PDF)] |
| 24. | Recent Advances in InAs/GaSb Superlattices for Very Long Wavelength Infrared Detection G.J. Brown, F. Szmulowicz, K. Mahalingam, S. Houston, Y. Wei, A. Gin and M. Razeghi SPIE Conference, San Jose, CA, Vol. 4999, pp. 457-- January 27, 2003 ...[Visit Journal] New infrared (IR) detector materials with high sensitivity, multi-spectral capability, improved uniformity and lower manufacturing costs are required for numerous long and very long wavelength infrared imaging applications. One materials system has shown great theoretical and, more recently, experimental promise for these applications: InAs/InxGa1-xSb type-II superlattices. In the past few years, excellent results have been obtained on photoconductive and photodiode samples designed for infrared detection beyond 15 microns. The infrared properties of various compositions and designs of these type-II superlattices have been studied. The infrared photoresponse spectra are combined with quantum mechanical modeling of predicted absorption spectra to provide insight into the underlying physics behind the quantum sensing in these materials. Results for superlattice photodiodes with cut-off wavelengths as long as 25 microns are presented. [reprint (PDF)] |
| 24. | Demonstration of long wavelength infrared Type-II InAs/InAs1-xSbx superlattices photodiodes on GaSb substrate grown by metalorganic chemical vapor deposition D. H. Wu, A. Dehzangi, Y. Y. Zhang, M. Razeghi Applied Physics Letters 112, 241103-- June 12, 2018 ...[Visit Journal] We report the growth and characterization of long wavelength infrared type-II InAs/InAs1−xSbx superlattices photodiodes with a 50% cut-off wavelength at 8.0 μm on GaSb substrate grown by metalorganic chemical vapor deposition. At 77 K, the photodiodes exhibited a differential resistance at zero bias (R0A) 8.0 Ω·cm2, peak responsivity of 1.26 A/W corresponding to a quantum efficiency of 21%. A specific detectivity of 5.4×1010 cm·Hz1/2/W was achieved at 7.5 μm. [reprint (PDF)] |
| 23. | Aluminum free GaInP/GaAs Quantum Well Infrared Photodetectors for Long Wavelength Detection C. Jelen, S. Slivken, J. Hoff, M. Razeghi, and G. Brown Applied Physics Letters 70 (3)-- January 20, 1997 ...[Visit Journal] We demonstrate quantum well infrared photodetectors based on a GaAs/Ga0.51In0.49P superlattice structure grown by gas-source molecular beam epitaxy. Wafers were grown with varying well widths. Wells of 40, 65, and 75 Å resulted in peak detection wavelengths of 10.4, 12.8, and 13.3 μm with a cutoff wavelength of 13.5, 15, and 15.5 μm, respectively. The measured peak and cutoff wavelengths match those predicted by eight band theoretical analysis. Measured dark currents were lower than equivalent GaAs/AlGaAs samples. [reprint (PDF)] |
| 23. | Widely tuned room temperature terahertz quantum cascade laser sources based on difference-frequency generation Q.Y. Lu, N. Bandyopadhyay, S. Slivken, Y. Bai and M. Razeghi Applied Physics Letters, Vol. 101, No. 25, p. 251121-1-- December 17, 2012 ...[Visit Journal] We demonstrate room temperature THz quantum cascade laser sources with a broad spectral coverage based on intracavity difference-frequency generation. Two mid-infrared active cores based on the single-phonon resonance scheme are designed with a THz nonlinearity specially optimized at the high operating fields that correspond to the highest mid-infrared output powers. A Čerenkov phase-matching scheme along with integrated dual-period distributed feedback gratings are used for efficient THz extraction and spectral purification. Single mode emissions from 1.0 to 4.6 THz with a side-mode suppression ratio and output power up to 40 dB and 32 μW are obtained, respectively. [reprint (PDF)] |
| 23. | Long Wavelength Type-II Photodiodes Operating at Room Temperature H. Mohseni and M. Razeghi IEEE Photonics Technology Letters 13 (5)-- May 1, 2001 ...[Visit Journal] The operation of uncooled InAs-GaSb superlattice photodiodes with a cutoff wavelength of λc=8 μm and a peak detectivity of 1.2 × 108 cm·Hz½/W at zero bias is demonstrated. The detectivity is similar to the best uncooled HgCdTe detectors and microbolometers. However, the R0A product is more than two orders of magnitude higher than HgCdTe and the device is more than four orders of magnitude faster than microbolometers. These features combined with their low 1/f noise and high uniformity make these type-II photodiodes an excellent choice for uncooled high-speed IR imaging arrays [reprint (PDF)] |
| 23. | Uncooled InAs/GaSb Type-II infrared detectors grown on GaAs substrate for the 8–12 μm atmospheric window H. Mohseni, J. Wojkowski, M. Razeghi, G. Brown, and W. Mitchel IEEE Journal of Quantum Electronics 35 (7)-- July 1, 1999 ...[Visit Journal] We report on the growth and characterization of type-II infrared detectors with an InAs-GaSb superlattice active layer for the 8-12-mu m atmospheric window at 300 K, The material was grown by molecular beam epitaxy on semi-insulating GaAs substrates. Photoconductive detectors fabricated from the superlattices showed 80% cutoff at about 12 mu m at room temperature. The responsivity of the device is about 2 mA/W with a 1-V bias (E = 5 V/cm) and the maximum measured detectivity of the device is 1.3 x 10(8) cm.Hz(1/2)/W at 11 mu m at room temperature. The detector shows very weak temperature sensitivity. Also, the extracted effective carrier lifetime, tau = 26 ns, is an order of magnitude longer than the carrier lifetime in HgCdTe with similar bandgap and carrier concentration. [reprint (PDF)] |
| 23. | Low Noise Short Wavelength Infrared Avalanche Photodetector Using SB-Based Strained Layer Superlattice Arash Dehzangi, Jiakai Li, Manijeh Razeghi Photonics 2021, 8(5), 148; https://doi.org/10.3390/photonics8050148 Received: 8 March 2021 / Revised: 12 April 2021 / Accepted: 25 April 2021 / Published: 30 April 2021 ...[Visit Journal] We demonstrate low noise short wavelength infrared (SWIR) Sb-based type II superlattice (T2SL) avalanche photodiodes (APDs). The SWIR GaSb/(AlAsSb/GaSb) APD structure was designed based on impact ionization engineering and grown by molecular beam epitaxy on a GaSb substrate. At room temperature, the device exhibits a 50% cut-off wavelength of 1.74 µm. The device was revealed to have an electron-dominated avalanching mechanism with a gain value of 48 at room temperature. The electron and hole impact ionization coefficients were calculated and compared to give a better prospect of the performance of the device. Low excess noise, as characterized by a carrier ionization ratio of ~0.07, has been achieved. [reprint (PDF)] |
| 23. | 320x256 Solar-Blind Focal Plane Arrays based on AlxGa1-xN R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi Applied Physics Letters, 86 (1)-- January 3, 2005 ...[Visit Journal] We report AlGaN-based back-illuminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p–i–n photodiode array was hybridized to a 320×256 read-out integrated circuit entirely within our university research lab, and a working 320×256 camera was demonstrated. Several example solar-blind images from the camera are also provided. [reprint (PDF)] |
| 23. | Influence of Residual Impurity Background on the Non-radiative Recombination Processes in High Purity InAs/GaSb superlattice Photodiodes E.C.F. da Silva, D. Hoffman, A. Hood, B. Nguyen, P.Y. Delaunay and M. Razeghi Applied Physics Letters, 89 (24)-- December 11, 2006 ...[Visit Journal] The influence of the impurity background on the recombination processes in type-II InAs/GaSb superlattice photodiodes with a cutoff wavelength of approximately 4.8 μm was investigated by electroluminescence measurements. Using an iterative fitting procedure based on the dependence of the quantum efficiency of the electroluminescence on the injection current, the Auger and Shockley-Read-Hall lifetimes were determined [reprint (PDF)] |
| 23. | Solar-blind avalanche photodiodes R. McClintock, K. Minder, A. Yasan, C. Bayram, F. Fuchs, P. Kung and M. Razeghi SPIE Conference, San Jose, CA, Vol. 6127, pp. 61271D-- January 23, 2006 ...[Visit Journal] There is a need for semiconductor based UV photodetectors to support avalanche gain in order to realize better performance and more effectively compete with existing photomultiplier tubes. However, there are numerous technical issues associated with the realization of high-quality solar-blind avalanche photodiodes (APDs). In this paper, APDs operating at 280 nm, within the solar-blind region of the ultraviolet spectrum, are investigated. [reprint (PDF)] |
| 23. | Room Temperature, Continuous Wave Quantum Cascade Laser Grown Directly on a Si Wafer Steven Slivken and Manijeh Razeghi S. Slivken and M. Razeghi,, Journal of Quantum Electronics, Vol. 59, No. 4, doi: 10.1109/JQE.2023.3282710 ...[Visit Journal] We report the room temperature demonstration of a high power, continuous wave, LWIR quantum cascade laser grown directly on a Si substrate. A new wafer, based on a high efficiency, strain-balanced laser core was processed into a lateral injection buried heterostructure laser geometry. A pulsed efficiency of 11.1% was demonstrated at room temperature, with
an emission wavelength of 8.35 μm. With low fidelity, epilayer-up packaging, CW emission up to 343 K was also demonstrated, with a maximum output power of >0.7 W near room temperature. [reprint (PDF)] |
| 23. | Room Temperature Terahertz and Frequency Combs Based on Intersubband Quantum Cascade Laser Diodes: History and Future Manijeh Razeghi , and Quanyong Lu Photonics 2025, 12(1), 79; ...[Visit Journal] : The year 2024 marks the 30-year anniversary of the quantum cascade laser (QCL),
which is becoming the leading laser source in the mid-infrared (mid-IR) range. Since
the first demonstration, QCL has undergone tremendous development in terms of the
output power, wall plug efficiency, spectral coverage, wavelength tunability, and beam
quality. Owing to its unique intersubband transition and fast gain features, QCL possesses
strong nonlinearities that makes it an ideal platform for nonlinear photonics like terahertz
(THz) difference frequency generation and direct frequency comb generation via fourwave mixing when group velocity dispersion is engineered. The feature of broadband,
high-power, and low-phase noise of QCL combs is revolutionizing mid-IR spectroscopy
and sensing by offering a new tool measuring multi-channel molecules simultaneously
in the µs time scale. While THz QCL difference frequency generation is becoming the
only semiconductor light source covering 1–5 THz at room temperature. In this paper, we
will introduce the latest research from the Center for Quantum Devices at Northwestern
University and briefly discuss the history of QCL, recent progress, and future perspective of
QCL research, especially for QCL frequency combs, room temperature THz QCL difference
frequency generation, and major challenges facing QCL in the future.
[reprint (PDF)] |
| 23. | Active and passive infrared imager based on short-wave and mid-wave type-II superlattice dual-band detectors E.K. Huang, A. Haddadi, G. Chen, A.M. Hoang, and M. Razeghi Optics Letters, Vol. 38, no. 1, p. 22-24-- January 1, 2013 ...[Visit Journal] A versatile dual-band detector capable of active and passive use is demonstrated using short-wave (SW) and midwave(MW) IR type-II superlattice photodiodes. A bilayer etch-stop scheme is introduced for back-side-illuminated detectors, which enhanced the external quantum efficiency both in the SWIR and MWIR spectral regions. Temperature-dependent dark current measurements of pixel-sized 27 μm detectors found the dark current density
to be ~1 × 10-5 A/cm² for the ∼4.2 μm cutoff MWIR channel at 140 K. This corresponded to a reasonable imager noise equivalent difference in temperature of ∼49 mK using F∕2.3 optics and a 10 ms integration time (tint), which lowered to ∼13 mK at 110 K using tint 30 ms, illustrating the potential for high-temperature operation. The SWIR channel was found to be limited by readout noise below 150 K. Excellent imagery from the dual-band imager exemplifying pixel coincidence is shown. [reprint (PDF)] |
| 23. | Type-II InAs/GaSb superlattice photovoltaic detectors with cutoff wavelength approaching 32 μm Y. Wei, A. Gin, M. Razeghi and G.J. Brown Applied Physics Letters, 81 (19)-- November 4, 2002 ...[Visit Journal] We report the most recent advance in the area of type-II InAs/GaSb superlattice photovoltaic detectors that have cutoff wavelengths beyond 25 μm, with some at nearly 32 μm. The photodiodes with a heterosuperlattice junction showed Johnson noise limited peak detectivity of 1.05 x 1010 cm Hz½/W at 15 μm under zero bias, and peak responsivity of 3 A/W under -40 mV reverse bias at 34 K illuminated by ~300 K background with a 2π field-of-view. The maximum operating temperature of these detectors ranges from 50 to 65 K. No detectable change in the blackbody response has been observed after 5-6 thermal cyclings, with temperature varying between 15 and 296 K in vacuum. [reprint (PDF)] |
| 23. | Cubic Phase GaN on Nano-grooved Si (100) via Maskless Selective Area Epitaxy Bayram, C., Ott, J. A., Shiu, K.-T., Cheng, C.-W., Zhu, Y., Kim, J., Razeghi, M. and Sadana, D. K. Adv. Funct. Mater. 2014-- April 1, 2014 ...[Visit Journal] A method of forming cubic phase (zinc blende) GaN (referred as c-GaN) on a CMOS-compatible on-axis Si (100) substrate is reported. Conventional GaN materials are hexagonal phase (wurtzite) (referred as h-GaN) and possess very high polarization fields (∼MV/cm) along the common growth direction of <0001>. Such large polarization fields lead to undesired shifts (e.g., wavelength and current) in the performance of photonic and vertical transport electronic devices. The cubic phase of GaN materials is polarization-free along the common growth direction of <001>, however, this phase is thermodynamically unstable, requiring low-temperature deposition conditions and unconventional substrates (e.g., GaAs). Here, novel nano-groove patterning and maskless selective area epitaxy processes are employed to integrate thermodynamically stable, stress-free, and low-defectivity c-GaN on CMOS-compatible on-axis Si. These results suggest that epitaxial growth conditions and nano-groove pattern parameters are critical to obtain such high quality c-GaN. InGaN/GaN multi-quantum-well structures grown on c-GaN/Si (100) show strong room temperature luminescence in the visible spectrum, promising visible emitter applications for this technology. [reprint (PDF)] |
| 23. | High performance bias-selectable three-color Short-wave/Mid-wave/Long-wave Infrared Photodetectors based on Type-II InAs/GaSb/AlSb superlattices Anh Minh Hoang, Arash Dehzangi, Sourav Adhikary, & Manijeh Razeghi Nature Scientific Reports 6, Article number: 24144-- April 7, 2016 ...[Visit Journal] We propose a new approach in device architecture to realize bias-selectable three-color shortwave-midwave-longwave infrared photodetectors based on InAs/GaSb/AlSb type-II superlattices. The effect of conduction band off-set and different doping levels between two absorption layers are employed to control the turn-on voltage for individual channels. The optimization of these parameters leads to a successful separation of operation regimes; we demonstrate experimentally three-color photodiodes without using additional terminal contacts. As the applied bias voltage varies, the photodiodes exhibit sequentially the behavior of three different colors, corresponding to the bandgap of three absorbers. Well defined cut-offs and high quantum efficiency in each channel are achieved. Such all-in-one devices also provide the versatility of working as single or dual-band photodetectors at high operating temperature. With this design, by retaining the simplicity in device fabrication, this demonstration opens the prospect for three-color infrared imaging. [reprint (PDF)] |
| 23. | Anomalous Hall Effect in InSb Layers Grown by MOCVD on GaAs Substrates C. Besikci, Y.H. Choi, R. Sudharsanan, and M. Razeghi Journal of Applied Physics 73 (10)-- May 15, 1993 ...[Visit Journal] InSb epitaxial layers have been grown on GaAs substrates by low‐pressure metalorganic chemical vapor deposition. A 3.15 μm thick film yielded an x‐ray full width at half maximum of 171 arcsec. A Hall mobility of 76 200 cm²/V· s at 240 K and a full width at half maximum of 174 arcsec have been measured for a 4.85 μm thick epilayer. Measured Hall data have shown anomalous behavior. A decrease in Hall mobility with decreasing temperature has been observed and room‐temperature Hall mobility has increased with thickness. In order to explain the anomalous Hall data, and the thickness dependence of the measured parameters, the Hall coefficient and Hall mobility have been simulated using a three‐layer model including a surface layer, a bulklike layer, and an interface layer with a high density of defects. Theoretical analysis has shown that anomalous behavior can be attributed to donor-like defects caused by the large lattice mismatch and to a surface layer which dominates the transport in the material at low temperatures. [reprint (PDF)] |
| 22. | InSb Infrared Photodetectors on Si Substrates Grown by Molecular Beam Epitaxy E. Michel, J. Xu, J.D. Kim, I. Ferguson, and M. Razeghi IEEE Photonics Technology Letters 8 (5) pp. 673-- May 1, 1996 ...[Visit Journal] The InSb infrared photodetectors grown heteroepitaxially on Si substrates by molecular beam epitaxy (MBE) are reported. Excellent InSb material quality is obtained on 3-in Si substrates (with a GaAs predeposition) as confirmed by structural, optical, and electrical analysis. InSb infrared photodetectors on Si substrates that can operate from 77 K to room temperature have been demonstrated. The peak voltage-responsitivity at 4 μm is about 1.0×103 V/W and the corresponding Johnson-noise-limited detectivity is calculated to be 2.8×1010 cm·Hz½/W. This is the first important stage in developing InSb detector arrays or monolithic focal plane arrays (FPAs) on silicon. The development of this technology could provide a challenge to traditional hybrid FPA's in the future. [reprint (PDF)] |
| 22. | High power continuous operation of a widely tunable quantum cascade laser with an integrated amplifier S. Slivken, S. Sengupta, and M. Razeghi Applied Physics Letters 107, 251101-- December 21, 2015 ...[Visit Journal] Wide electrical tuning and high continuous output power is demonstrated from a single mode quantum cascade laser emitting at a wavelength near 4.8 μm. This is achieved in a space efficient manner by integrating an asymmetric sampled grating distributed feedback tunable laser with an optical amplifier. An initial demonstration of high peak power operation in pulsed mode is demonstrated first, with >5 W output over a 270 nm (113 cm−1) spectral range. Refinement of the geometry leads to continuous operation with a single mode spectral coverage of 300 nm (120 cm−1) and a maximum continuous power of 1.25 W. The output beam is shown to be nearly diffraction-limited, even at high amplifier current. [reprint (PDF)] |
| 22. | Modeling Type-II InAs/GaSb Superlattices Using Empirical Tight-Binding Method: New Aspects Y. Wei, M. Razeghi, G.J. Brown, and M.Z. Tidrow SPIE Conference, Jose, CA, Vol. 5359, pp. 301-- January 25, 2004 ...[Visit Journal] The recent advances in the experimental work on the Type-II InAs/GaSb superlattices necessitate a modeling that can handle arbitrary layer thickness as well as different types of interfaces in order to guide the superlattice design. The empirical tight-binding method (ETBM) is a very good candidate since it builds up the Hamiltonian atom by atom. There has been a lot of research work on the modeling of Type-II InAs/GaSb superlattices using the ETBM. However, different groups generate very different accuracy comparing with experimental results. We have recently identified two major aspects in the modeling: the antimony segregation and the interface effects. These two aspects turned out to be of crucial importance governing the superlattice properties, especially the bandgap. We build the superlattice Hamiltonian using antimony segregated atomic profile taking into account the interface. Our calculations agree with our experimental results within growth uncertainties. In addition we introduced the concept of GaxIn1-x type interface engineering, which will add another design freedom especially in the mid-wavelength infrared range (3~7 µm) in orderto reduce the lattice mismatch. [reprint (PDF)] |
| 22. | Type-II InAs/GaSb Superlattices and Detectors with Cutoff Wavelength Greater Than 18 μm M. Razeghi, Y. Wei, A. Gin, G.J. Brown and D. Johnstone Proceedings of the SPIE, San Jose, CA, Vol. 4650, 111 (2002)-- January 25, 2002 ...[Visit Journal] The authors report the most recent advances in Type-II InAs/GaSb superlattice materials and photovoltaic detectors. Lattice mismatch between the substrate and the superlattice has been routinely achieved below 0.1%, and less than 0.0043% as the record. The FWHM of the zeroth order peak from x-ray diffraction has been decreased below 50 arcsec and a record of less than 44arcsec has been achieved. High performance detectors with 50% cutoff beyond 18 micrometers up to 26 micrometers have been successfully demonstrated. The detectors with a 50% cut-off wavelength of 18.8 micrometers showed a peak current responsivity of 4 A/W at 80K, and a peak detectivity of 4.510 cm·Hz½·W-1 was achieved at 80K at a reverse bias of 110 mV under 300 K 2(pi) FOV background. Some detectors showed a projected 0% cutoff wavelength up to 28~30 micrometers . The peak responsivity of 3Amp/Watt and detectivity of 4.2510 cm·Hz½·W-1 was achieved under -40mV reverse bias at 34K for these detectors. [reprint (PDF)] |
| 22. | Interface-induced Suppression of the Auger Recombination in Type-II InAs/GaSb Superlattices H. Mohseni, V.I. Litvinov and M. Razeghi Physical Review B 58 (23)-- December 15, 1998 ...[Visit Journal] The temperature dependence of the nonequilibrium carriers lifetime has been deduced from the measurement of the photocurrent response in InAs/GaSb superlattices. Based on the temperature dependence of the responsivity and modeling of the transport parameters we have found that the carrier lifetime weakly depends on temperature in the high-temperature region. This indicates the temperature dependence of the Auger recombination rate with no threshold that differs it from that in the bulk material and can be attributed to the interface-induced suppression of the Auger recombination in thin quantum wells. [reprint (PDF)] |
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