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14.  Amorphous ZnO films grown by room temperature pulsed laser deposition on paper and mylar for transparent electronics applications
D.J. Rogers, V.E. Sandana, F. Hosseini Teherani, R. McClintock, M. Razeghi, and H.J. Drouhin
SPIE Proceedings, San Francisco, CA (January 22-27, 2011), Vol. 7940, p. 79401K-- January 24, 2011 ...[Visit Journal]
Recently, there has been a surge of activity in the development of next-generation transparent thin film transistors for use in applications such as electronic paper and flexible organic light emitting diode panels. Amongst the transparent conducting oxides attracting the most interest at present are Amorphous Oxide Semiconductors (AOS) based on ZnO because they exhibit enhanced electron mobility (μ), superior capacity for processability in air and improved thermodynamic stability compared with conventional covalent amorphous semiconductors and existing AOS. Moreover, they give excellent performance when fabricated at relatively low temperature and can readily be made in large area format. Thus, they are projected to resolve the trade-off between processing temperature and device performance and thereby allow fabrication on inexpensive heatsensitive substrates. For the moment, however, an undesireable post-deposition annealing step at a temperature of about 200ºC is necessary in order to obtain suitable electrical and optical properties. This paper demonstrates the possibility of directly engineering amorphous ZnO with relatively high conductiviy at room temperature on paper and mylar substrates using pulsed laser deposition. [reprint (PDF)]
 
14.  Solar-blind AlGaN photodiodes with very low cutoff wavelength
D. Walker, V. Kumar, K. Mi, P. Sandvik, P. Kung, X.H. Zhang, and M. Razeghi
Applied Physics Letters 76 (4)-- January 24, 2000 ...[Visit Journal]
We report the fabrication and characterization of AlxGa1–xN photodiodes (x~0.70) grown on sapphire by low-pressure metalorganic chemical vapor deposition. The peak responsivity for –5 V bias is 0.11 A/W at 232 nm, corresponding to an internal quantum efficiency greater than 90%. The device response drops four orders of magnitude by 275 nm and remains at low response for the entire near-ultraviolet and visible spectrum. Improvements were made to the device design including a semitransparent Ni/Au contact layer and a GaN:Mg cap layer, which dramatically increased device response by enhancing the carrier collection efficiency. [reprint (PDF)]
 
14.  Current status of high performance quantum cascade lasers at the center for quantum devices
M. Razeghi; A. Evans; Y. Bai; J. Nguyen; S. Slivken; S.R. Darvish; K. Mi
Conference Proceedings - International Conference on Indium Phosphide and Related Materials. 588-593:[4266015] (2007)-- May 14, 2007 ...[Visit Journal]
Mid-infrared laser sources are highly desired for laser-based trace chemical sensors, military countermeasures, free-space communications, as well as developing medical applications. While application development has been limited by the availability of adequate mid-infrared sources, InP-based quantum cascade lasers (QCLs) hold promise as inexpensive, miniature, portable solutions capable of producing high powers and operating at high temperatures with excellent beam quality and superior reliability. This paper discusses the most recent developments of application-ready high power (> 100 mW), continuous-wave (CW), mid-infrared QCLs operating above room temperature with lifetimes exceeding 13,000 hours. [reprint (PDF)]
 
14.  High Optical Response in Forward Biased (In,Ga)N-GaN Multiquantum-Well Diodes Under Barrier Illumination
J.L. Pau, R. McClintock, C. Bayram, K. Minder, D. Silversmith and M. Razeghi
IEEE Journal of Quantum Electronics, Vol. 44, No. 4, p. 346-353.-- April 1, 2008 ...[Visit Journal]
The authors report on the current–voltage (I–V) characteristic under forward biases obtained in low leakage, small size p-(In,Ga)N–GaN-n multiquantum well diodes. Under barrier illumination, the devices present a high optical response with capabilities to detect optical powers in the pW range without further amplification. This response is attributed to the screening of the internal electric fields. Recombination times of a few seconds are found to be associated to this mechanism. Moreover, a step-like feature is found in the I– V characteristic before the diode turn-on voltage. Our model proposes tunneling current through the multi-quantum-well structure as responsible of this feature. Fast modulation of the tunneling effect under barrier illumination is used to evaluate the detection of low photon fluxes. [reprint (PDF)]
 
14.  Aluminum free GaInP/GaAs Quantum Well Infrared Photodetectors for Long Wavelength Detection
C. Jelen, S. Slivken, J. Hoff, M. Razeghi, and G. Brown
Applied Physics Letters 70 (3)-- January 20, 1997 ...[Visit Journal]
We demonstrate quantum well infrared photodetectors based on a GaAs/Ga0.51In0.49P superlattice structure grown by gas-source molecular beam epitaxy. Wafers were grown with varying well widths. Wells of 40, 65, and 75 Å resulted in peak detection wavelengths of 10.4, 12.8, and 13.3 μm with a cutoff wavelength of 13.5, 15, and 15.5 μm, respectively. The measured peak and cutoff wavelengths match those predicted by eight band theoretical analysis. Measured dark currents were lower than equivalent GaAs/AlGaAs samples. [reprint (PDF)]
 
14.  Extended short wavelength infrared heterojunction phototransistors based on type II superlattices
Arash Dehzangi , Ryan McClintock, Donghai Wu , Abbas Haddadi, Romain Chevallier , and Manijeh Razeghi
Applied Physics Letters 114, 191109-- May 17, 2019 ...[Visit Journal]
A two terminal extended short wavelength infrared heterojunction phototransistor based on type-II InAs/AlSb/GaSb on a GaSb substrate is designed, fabricated, and investigated. With the base thickness of 40 nm, the device exhibited a 100% cut-off wavelength of 2.3 λ at 300 K. The saturated peak responsivity value is 320.5 A/W at 300 K, under front-side illumination without any antireflection coating. A saturated optical gain of 245 at 300K was measured. At the same temperature, the device exhibited a collector dark current density (at unity optical gain) and a DC current gain of 7.8 X 103 A/cm² and 1100, respectively. The device exhibited a saturated dark current shot noise limited specific detectivity of 4.9 X 1011 cm·Hz½/W at 300 K which remains constant over a broad range of wavelengths and applied biases. [reprint (PDF)]
 
14.  Efficiency of photoluminescence and excess carrier confinement in InGaAsP/GaAs structures prepared by metal-organic chemical vapor deposition
J. Diaz, H.J. Yi, M. Erdtmann, X. He, E. Kolev, D. Garbuzov, E. Bigan, and M. Razeghi
Journal of Applied Physics 76 (2)-- July 15, 1994 ...[Visit Journal]
Special double‐ and separate‐confinement InGaAsP/GaAs heterostructures intended for photoluminescence measurements have been grown by low‐pressure metal‐organic chemical‐vapor deposition. The band gap of the active region quaternary material was close to 1.5 eV, and the waveguide of the separate‐confinement structures was near 1.8 eV. Measurement of the integrated luminescence efficiency at 300 K has shown that over a wide range of excitation level (10–103 W/cm²) radiative transitions are the dominant mechanism for excess carrier recombination in the active region of the structures studied. As determined by spectral measurements, the excess carrier concentration in the waveguide of the separate‐confinement heterostructures and the intensity of the waveguide emission band correspond to a condition of thermal equilibrium of the excess carrier populations in the active region and the waveguide. The ratio of the intensity of the waveguide emission to the active region emission fits a model which assumes that the barrier height for minority carriers (holes) is equal to the difference in band gaps between the active region and the waveguide region. [reprint (PDF)]
 
14.  Injector doping level dependent continuous-wave operation of InP-based QCLs at λ~ 7.3 µm above room temperature
J.S. Yu, S. Slivken, and M. Razeghi
Semiconductor Science and Technology (SST), Vol. 25, No. 12, p. 125015-- December 1, 2010 ...[Visit Journal]
We report the continuous-wave (CW) operation of InGaAs/InAlAs quantum cascade lasers (QCLs) operating at λ ~ 7.3 µm above room temperature. The injector doping level–dependent CW characteristics above room temperature are investigated for doping densities between 7 × 1016 cm−3 and 2 × 1017 cm−3. The device performance, i.e. threshold current density, output power, operating temperature and characteristic temperature, depends strongly on the injector doping density. For a relatively low injector doping density of 7 × 1016 cm−3, a high-reflectivity-coated 10 µm wide and 4 mm long laser exhibits an improved device performance with an output power of 152 mW and a threshold current density of 1.37 kA cm−2 at 298 K under CW mode, operating up to 343 K. The thermal characteristics are also analyzed by the estimation from the experimentally measured data for the QCLs with different injector doping densities. [reprint (PDF)]
 
14.  High-quality visible-blind AlGaN p-i-n photodiodes
E. Monroy, M. Hamilton, D. Walker, P. Kung, F.J. Sanchez, and M. Razeghi
Applied Physics Letters 74 (8)-- February 22, 1999 ...[Visit Journal]
We report the fabrication and characterization of AlxGa1−xN p-i-n photodiodes (0 < x < 0.15) grown on sapphire by low-pressure metalorganic chemical vapor deposition. The devices present a visible rejection of six orders of magnitude with a cutoff wavelength that shifts from 365 to 338 nm. Photocurrent decays are exponential for high load resistances, with a time constant that corresponds to the RC product of the system. For low load resistances, the transient response becomes non-exponential, with a decay time longer than the RC constant. This behavior is justified by the strong frequency dependence of the device capacitance. By an admittance analysis, we conclude that speed is not limited by deep levels, but by substitutional Mg capture and emission time. [reprint (PDF)]
 
14.  Pulsed metalorganic chemical vapor deposition of high quality AlN/GaN superlattices for intersubband transitions
C. Bayram, B. Fain, N. Pere-Laperne, R. McClintock and M. Razeghi
SPIE Proceedings, San Jose, CA Volume 7222-12-- January 26, 2009 ...[Visit Journal]
A pulsed metalorganic chemical vapor deposition (MOCVD) technique, specifically designed for high quality AlN/GaN superlattices (SLs) is introduced. Optical quality and precise controllability over layer thicknesses are investigated. Indium is shown to improve interface and surface quality. An AlN/GaN SL designed for intersubband transition at a telecommunication wavelength of ~1.5 µm, is grown, and processed for intersubband (ISB) absorption measurements. Room temperature measurements show intersubband absorption centered at 1.49 µm. Minimal (n-type) silicon doping of the well is shown to be crucial for good ISB absorption characteristics. The potential to extend this technology into the far infrared and even the terahertz (THz) region is also discussed. [reprint (PDF)]
 
14.  Comparison of the Physical Properties of GaN Thin Films Deposited on (0112) and (0001) Sapphire Substrates
C.J. Sun and M. Razeghi
Applied Physics Letters 63 (7)-- August 16, 1993 ...[Visit Journal]
A direct comparison of the physical properties of GaN thin films is made as a function of the choice of substrate orientations. Gallium nitride single crystals were grown on (0001) and (0112) sapphire substrates by metalorganic chemical vapor deposition. Better crystallinity with fine ridgelike facets is obtained on the (0112) sapphire. Also lower carrier concentration and higher mobilities indicate both lower nitrogen vacancies and less oxygen incorporation on the (0112) sapphire. The results of this study show better physical properties of GaN thin films achieved on (0112) sapphire. [reprint (PDF)]
 
14.  First observation of the two‐dimensional properties of the electron gas in Ga0.49In0.51P/GaAs heterojunctions grown by low pressure metalorganic chemical vapor deposition
M. Razeghi; P. Maurel; F. Omnés; S. Ben Armor; L. Dmowski; J. C. Portal
M. Razeghi, P. Maurel, F. Omnés, S. Ben Armor, L. Dmowski, J. C. Portal; First observation of the two‐dimensional properties of the electron gas in Ga0.49In0.51P/GaAs heterojunctions grown by low pressure metalorganic chemical vapor deposition. Appl. Phys. Lett. 12 May 1986; 48 (19): 1267–1269-- June 12, 1986 ...[Visit Journal]
We report the first observation of a two‐dimensional electron gas from Shubnikov–de Haas and quantum hall effect experiments in GaInP/GaAs heterostructures grown by low pressure metalorganic chemical vapor deposition. Angular‐dependent Shubnikov–de Haas measurements confirm two dimensionality of the system. Low‐temperature persistent photoconductivity was observed. Critical density at which the second electric subband starts to be populated was determined to be 7.3×1011 cm−2. [reprint (PDF)]
 
14.  Continuous wave quantum cascade lasers with 5.6 W output power at room temperature and 41% wall-plug efficiency in cryogenic operation
F. Wang, S. Slivken, D. H. Wu, Q. Y. Lu, and M. Razeghi
AIP Advances 10, 055120-- May 19, 2020 ...[Visit Journal]
In this paper, we report a post-polishing technique to achieve nearly complete surface planarization for the buried ridge regrowth processing of quantum cascade lasers. The planarized device geometry improves the thermal conduction and reliability and, most importantly, enhances the power and efficiency in continuous wave operation. With this technique, we demonstrate a high continuous wave wall-plug efficiency of an InP-based quantum cascade laser reaching ∼41% with an output power of ∼12 W from a single facet operating at liquid nitrogen temperature. At room temperature, the continuous wave output power exceeds the previous record, reaching ∼5.6 W. [reprint (PDF)]
 
14.  Recent progress of quantum cascade laser research from 3 to 12 μm at the Center for Quantum Devices
MANIJEH RAZEGHI,* WENJIA ZHOU,STEVEN SLIVKEN,QUAN-YONG LU,DONGHAI WU, AND RYAN MCCLINTOC
Applied Optics Vol. 56, No. 31 -- October 10, 2017 ...[Visit Journal]
The quantum cascade laser (QCL) is becoming the leading laser source in the mid-infrared (mid-IR) range, which contains two atmospheric transmission windows and many molecular fingerprint absorption features. Since its first demonstration in 1994, the QCL has undergone tremendous development in terms of the output power, wall plug efficiency, wavelength coverage, tunability and beam quality. At the Center for Quantum Devices, we have demonstrated high-power continuous wave operation of QCLs covering a wide wavelength range from 3 to 12 μm, with power output up to 5.1 W at room temperature. Recent research has resulted in power scaling in pulsed mode with up to 203 W output, electrically tunable QCLs based on monolithic sampled grating design, heterogeneous QCLs with a broad spectral gain, broadly tunable on-chip beam-combined QCLs, QCL-based mid-IR frequency combs, and fundamental mode surface emitting quantum cascade ring lasers. The developed QCLs will be the basis for a number of next-generation spectroscopy and sensing systems. [reprint (PDF)]
 
14.  Development of Quantum Cascade Lasers for High Peak Output Power and Low Threshold Current Density
S. Slivken and M. Razeghi
Solid State Electronics 46-- January 1, 2002 ...[Visit Journal]
Design and material optimization are used to both decrease the threshold current density and increase the output power for quantum cascade lasers. Waveguides are designed to try and minimize free-carrier and surface-plasmon absorption. Excellent material characterization is also presented, showing excellent control over layer thickness, interface quality, and doping level. Experiments are done to both optimize the injector doping level and to maximize the output power from a single aperture. At 300 K, a threshold current density as low as 1.8 kA/cm² is reported, along with peak powers of approximately 2.5 W. Strain-balanced lasers are also demonstrated at λnot, vert, similar5 μm, exhibiting threshold current densities<300 A/cm² at 80 K. These values represent the state-of-the-art for mid-infrared lasers with λ>4 μm [reprint (PDF)]
 
14.  Semiconductor ultraviolet detectors
M. Razeghi and A. Rogalski
Journal of Applied Physics Applied Physics Review 79 (10)-- May 15, 1996 ...[Visit Journal]
In this review article a comprehensive analysis of the developments in ultraviolet (UV) detector technology is described. At the beginning, the classification of UV detectors and general requirements imposed on these detectors are presented. Further considerations are restricted to modern semiconductor UV detectors, so the basic theory of photoconductive and photovoltaic detectors is presented in a uniform way convenient for various detector materials. Next, the current state of the art of different types of semiconductor UV detectors is presented. Hitherto, the semiconductor UV detectors have been mainly fabricated using Si. Industries such as the aerospace, automotive, petroleum, and others have continuously provided the impetus pushing the development of fringe technologies which are tolerant of increasingly high temperatures and hostile environments. As a result, the main efforts are currently directed to a new generation of UV detectors fabricated from wide band-gap semiconductors the most promising of which are diamond and AlGaN. The latest progress in development of AlGaN UV detectors is finally described in detail. [reprint (PDF)]
 
14.  Noise performance of InGaAs/InP quantum well infrared photodetectors
C. Jelen, S. Slivken, T. David, M. Razeghi and G. J. Brown
IEEE Journal of Quantum Electronics 34 (7)-- July 7, 1998
Dark current noise measurements were carried out between 10 and 10(4) Hz at T = 80 K on two InGaAs-InP quantum-well infrared photodetectors (QWIP's) designed for 8-mu m infrared (IR) detection. Using the measured noise data, we have calculated the thermal generation rate, bias-dependant gain, electron trapping probability, and electron diffusion length. The calculated thermal generation rate (similar to 7 x 10(22) cm(-3) s(-1)) is similar to AlGaAs-GaAs QWIP's with similar peak wavelengths, but the gain is 50x larger, indicating improved transport and carrier lifetime are obtained in the binary InP barriers. [reprint (PDF)]
 
14.  Investigation of surface leakage reduction for small pitch shortwave infrared photodetectors
Arash Dehzangi, Quentin Durlin, Donghai Wu, Ryan McClintock, Manijeh Razeghi
Semiconductor Science and Technology, 34(6), 06LT01-- May 25, 2019 ...[Visit Journal]
Different passivation techniques are investigated for reducing leakage current in small pixel (down to 9 μm) heterostructure photodetectors designed for the short-wavelength infrared range. Process evaluation test chips were fabricated using the same process as for focal plane arrays. Arrays of small photodetectors were electrically characterized under dark conditions from 150 K to room temperature. In order to evaluate the leakage current, we studied the relation between the inverse of dynamic resistance at −20 mV and zero bias and perimeter over area P/A ratio as the pixel size is scaled down. At 150 K, leakage current arising from the perimeter dominates while bulk leakage dominates at room temperature. We find that in shortwave devices directly underfilling hybridized devices with a thermoset epoxy resin without first doing any additional passivation/protection after etching gives the lowest leakage with a surface resistance of 4.2 × 109 and 8.9 × 103 Ω· cm−1 at 150 and 300 K, for −20 mV of bias voltage, respectively. [reprint (PDF)]
 
14.  Back-illuminated separate absorption and multiplication GaN avalanche photodiodes
J.L. Pau, C. Bayram, R. McClintock, M. Razeghi and D. Silversmith
Applied Physics Letters, Vol. 92, No. 10, p. 101120-1-- March 10, 2008 ...[Visit Journal]
The performance of back-illuminated avalanche photodiodes with separate absorption and multiplication regions is presented. Devices with an active area of 225 µm2 show a maximum multiplication gain of 41,200. The calculation of the noise equivalent power yields a minimum value of 3.3×10−14 W·Hz−1/2 at a gain of 3000, increasing to 2.0×10−13 W·Hz−1/2 at a gain of 41,200. The broadening of the response edge has been analyzed as a function of bias. [reprint (PDF)]
 
14.  Positive and negative luminescence in binary Type-II InAs/GaSb superlattice photodiodes
D. Hoffman and M. Razeghi
SPIE Conference, San Jose, CA, Vol. 6127, pp. 61271H-- January 23, 2006 ...[Visit Journal]
In the present work, we show measurements of both positive and negative luminescence of binary Type-II InAs/GaSb superlattice photodiodes in the 3 to 13 μm spectral range. Through a radiometric calibration technique, we demonstrate temperature independent negative luminescence efficiencies of 45 % in the midwavelength (MWIR) sample from 220 K to 320 K without anti-reflective coating and values reaching 35 % in the long wavelength infrared (LWIR) spectrum sample. [reprint (PDF)]
 
14.  InP-based quantum-dot infrared photodetectors with high quantum efficiency and high temperature imaging
S. Tsao, H. Lim, H. Seo, W. Zhang and M. Razeghi
IEEE Sensors Journal, Vol. 8, No. 6, p. 936-941-- June 1, 2008 ...[Visit Journal]
We report a room temperature operating InAs quantum-dot infrared photodetector grown on InP substrate. The self-assembled InAs quantum dots and the device structure were grown by low-pressure metalorganic chemical vapor depositon. The detectivity was 6 x 1010cm·Hz1/2·W-1 at 150 K and a bias of 5 V with a peak detection wavelength around 4.0 micron and a quantum efficiency of 48%. Due to the low dark current and high responsivity, a clear photoresponse has been observed at room temperature. A 320 x 256 middle wavelength infrared focal plane array operating at temperatures up to 200 K was also demonstrated. The focal plane array had 34 mA/W responsivity, 1.1% conversion efficiency, and noise equivalent temperature difference of 344 mK at 120 K operating temperature. [reprint (PDF)]
 
14.  High-Power Continuous-Wave Operation of Quantum-Cascade Lasers Up to 60 °C
J.S. Yu, A. Evans, J. David, L. Doris, S. Slivken and M. Razeghi
IEEE Photonics Technology Letters, 16 (3)-- March 1, 2004 ...[Visit Journal]
High-temperature high-power continuous-wave (CW) operation of high-reflectivity-coated 12 μm wide quantum-cascade lasers emitting at λ = 6 μm with a thick electroplated Au top contact layer is reported for different cavity lengths. For a 3 mm long laser, the CW optical output powers of 381 mW at 293 K and 22 mW at maximum operating temperature of 333 K (60°C) are achieved with threshold current densities of 1.93 and 3.09 kA/cm2, respectively. At 298 K, the same cavity gives a maximum wall plug efficiency of 3.17% at 1.07 A. An even higher CW optical output power of 424 mW at 293 K is obtained for a 4-mm-long laser and the device also operates up to 332 K with an output power of 14 mW. Thermal resistance is also analyzed at threshold as a function of cavity length. [reprint (PDF)]
 
14.  Crystallography of epitaxial growth of wurtzite-type thin films on sapphire substrates
P. Kung, C.J. Sun, A. Saxler, H. Ohsato, and M. Razeghi
Journal of Applied Physics 75 (9)-- May 1, 1994 ...[Visit Journal]
In this article, we present a crystallographic model to describe the epitaxial growth of wurtzite‐type thin films such as gallium nitride (GaN) on different orientations of sapphire (Al2O3) substrates. Through this model, we demonstrate the thin films grown on (00⋅1)Al2O3 have a better epilayer‐substrate interface quality than those grown on (01⋅2)Al2O3. We also show the epilayer grown on (00⋅1)Al2O3 are gallium‐terminated, and both (00⋅1) and (01⋅2) surfaces of sapphire crystals are oxygen‐terminated. [reprint (PDF)]
 
14.  Low-Threshold 7.3 μm Quantum Cascade Lasers Grown by Gas-Source Molecular Beam Epitaxy
S. Slivken, A. Matlis, A. Rybaltowski, Z. Wu and M. Razeghi
Applied Physics Letters 74 (19)-- May 19, 1999 ...[Visit Journal]
We report low-threshold 7.3 μm superlattice-based quantum cascade lasers. The threshold current density is 3.4 kA/cm² at 300 K and 1.25 kA/cm² at 79 K in pulsed mode for narrow (∼20 μm), 2 mm-long laser diodes. The characteristic temperature (T0) is 210 K. The slope efficiencies are 153 and 650 mW/A at 300 and 100 K, respectively. Power output is in excess of 100 mW at 300 K. Laser far-field intensity measurements give divergence angles of 64° and 29° in the growth direction and in the plane of the quantum wells, respectively. Far-field simulations show excellent agreement with the measured results. [reprint (PDF)]
 
14.  Aluminum nitride films on different orientations of sapphire and silicon
K. Dovidenko, S. Oktyabrsky, J. Narayan, and M. Razeghi
Journal of Applied Physics79 (5)-- March 1, 1996 ...[Visit Journal]
The details of epitaxial growth and microstrictural characteristics of AlN films grown on sapphire (0001), (1012) and Si (100), (111) substrates were investigated using plan‐view and cross‐sectional high‐resolution transmission electron microscopy and x‐ray diffraction techniques. The films were grown by metalorganic chemical vapor deposition using TMA1+NH3+N2 gas mixtures. Different degrees of epitaxy were observed for the films grown on α‐Al2O3 and Si substrates in different orientations. The epitaxial relationship for (0001) sapphire was found to be (0001)AlN∥(0001)sap with in‐plane orientation relationship of [0110]AlN∥[1210]sap. This is equivalent to a 30° rotation in the basal (0001) plane. For (1012) sapphire substrates, the epitaxial relationship was determined to be (1120)AlN∥(1012)sap with the in‐plane alignment of [0001]AlN∥[1011]sap. The AlN films on (0001) α‐Al2O3 were found to contain inverted domain boundaries and a/3〈1120〉 threading dislocations with the estimated density of 1010 cm−2. The density of planar defects (stacking faults) found in AlN films was considerably higher in the case of (1012) compared to (0001) substrates. Films on Si substrates were found to be highly textured c axis oriented when grown on (111) Si, and c axis textured with random in‐plane orientation on (100) Si. The role of thin‐film defects and interfaces on device fabrication is discussed. [reprint (PDF)]
 

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