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19.  Injector doping level dependent continuous-wave operation of InP-based QCLs at λ~ 7.3 µm above room temperature
J.S. Yu, S. Slivken, and M. Razeghi
Semiconductor Science and Technology (SST), Vol. 25, No. 12, p. 125015-- December 1, 2010 ...[Visit Journal]
We report the continuous-wave (CW) operation of InGaAs/InAlAs quantum cascade lasers (QCLs) operating at λ ~ 7.3 µm above room temperature. The injector doping level–dependent CW characteristics above room temperature are investigated for doping densities between 7 × 1016 cm−3 and 2 × 1017 cm−3. The device performance, i.e. threshold current density, output power, operating temperature and characteristic temperature, depends strongly on the injector doping density. For a relatively low injector doping density of 7 × 1016 cm−3, a high-reflectivity-coated 10 µm wide and 4 mm long laser exhibits an improved device performance with an output power of 152 mW and a threshold current density of 1.37 kA cm−2 at 298 K under CW mode, operating up to 343 K. The thermal characteristics are also analyzed by the estimation from the experimentally measured data for the QCLs with different injector doping densities. [reprint (PDF)]
 
19.  III-Nitride avalanche photodiodes
R. McClintock, J.L. Pau, C. Bayram, B. Fain, P. Giedratis, M. Razeghi and M. Ulmer
SPIE Proceedings, San Jose, CA Volume 7222-0U-- January 26, 2009 ...[Visit Journal]
Research into avalanche photodiodes (APDs) is motivated by the need for high sensitivity ultraviolet (UV) detectors in numerous civilian and military applications. By designing photodetectors to utilize low-noise impact ionization based gain, GaN APDs operating in Geiger mode can deliver gains exceeding 1×107. Thus with careful design, it becomes possible to count photons at the single photon level. In this paper we review the current state of the art in III-Nitride visible-blind APDs, and present our latest results regarding linear and Geiger mode III-Nitride based APDs. This includes novel device designs such as separate absorption and multiplication APDs (SAM-APDs). We also discuss control of the material quality and the critical issue of p-type doping - demonstrating a novel delta-doping technique for improved material quality and enhanced electric field confinement. The spectral response and Geiger-mode photon counting performance of these devices are then analyzed under low photon fluxes, with single photon detection capabilities being demonstrated. Other major technical issues associated with the realization of high-quality visible-blind Geiger mode APDs are also discussed in detail and future prospects for improving upon the performance of these devices are outlined. [reprint (PDF)]
 
19.  High operating temperature midwave infrared photodiodes and focal plane arrays based on type-II InAs/GaSb superlattices
S. Abdollahi Pour, E.K. Huang, G. Chen, A. Haddadi, B.M. Nguyen and M. Razeghi
Applied Physics Letters, Vol. 98, No. 14, p. 143501-1-- April 4, 2011 ...[Visit Journal]
The dominant dark current mechanisms are identified and suppressed to improve the performance of midwave infrared InAs/GaSb Type-II superlattice photodiodes at high temperatures. The optimized heterojunction photodiode exhibits a quantum efficiency of 50% for 2 μm thick active region without any bias dependence. At 150 K, R0A of 5100 Ω·cm² and specific detectivity of 1.05×1012 cm·Hz0.5·W-1 are demonstrated for a 50% cutoff wavelength of 4.2 μm. Assuming 300 K background temperature and 2π field of view, the performance of the detector is background limited up to 180 K, which is improved by 25 °C compared to the homojunction photodiode. Infrared imaging using f/2.3 optics and an integration time of 10.02 ms demonstrates a noise equivalent temperature difference of 11 mK at operating temperatures below 120 K. [reprint (PDF)]
 
19.  Low threshold GaInAsP/InP lasers with good temperature dependence grown by low pressure MOVPE
J.-P. Hirtz, M. Razeghi, J.-P. Larivain, S. Hersee, J.-P. Duchemin
Electronics Letters Volume 17, Issue 3 https://doi.org/10.1049/el:19810081-- February 1, 1981 ...[Visit Journal]
Room temperature pulsed operation has been achieved in the 1.2–1.3 μm region for GaInAsP/InP lasers grown by low pressure metalorganic vapour phase epitaxy. Thresholds as low as 1.2 kA/cm2 and threshold temperature dependences of exp T/T0, with T0 up to 80 K, have been obtained. [reprint (PDF)]
 
19.  Ultrafast Pulse Generation from Quantum Cascade Lasers
Feihu Wang, Xiaoqiong Qi, Zhichao Chen, Manijeh Razeghi, and Sukhdeep Dhillon
Wang, F.; Qi, X.; Chen, Z.; Razeghi, M.; Dhillon, S. Ultrafast Pulse Generation from Quantum Cascade Lasers. Micromachines 2022, 13, 2063. https://doi.org/10.3390/ mi13122063 ...[Visit Journal]
Quantum cascade lasers (QCLs) have broken the spectral barriers of semiconductor lasers and enabled a range of applications in the mid-infrared (MIR) and terahertz (THz) regimes. However, until recently, generating ultrashort and intense pulses from QCLs has been difficult. This would be useful to study ultrafast processes in MIR and THz using the targeted wavelength-by-design properties of QCLs. Since the first demonstration in 2009, mode-locking of QCLs has undergone considerable development in the past decade, which includes revealing the underlying mechanism of pulse formation, the development of an ultrafast THz detection technique, and the invention of novel pulse compression technology, etc. Here, we review the history and recent progress of ultrafast pulse generation from QCLs in both the THz and MIR regimes. [reprint (PDF)]
 
19.  Effects of well width and growth temperature on optical and structural characteristics of AlN/GaN superlattices grown by metal-organic chemical vapor deposition
C. Bayram, N. Pere-Laperne, and M. Razeghi
Applied Physics Letters, Vol. 95, No. 20, p. 201906-1-- November 16, 2009 ...[Visit Journal]
AlN/GaN superlattices (SLs) employing various well widths (from 1.5 to 7.0 nm) are grown by metal-organic chemical vapor deposition technique at various growth temperatures (Ts) (from 900 to 1035 °C). The photoluminescence (PL), x-ray diffraction, and intersubband (ISB) absorption characteristics of these SLs and their dependency on well width and growth temperature are investigated. Superlattices with thinner wells (grown at the same Ts) or grown at lower Ts (employing the same well width) are shown to demonstrate higher strain effects leading to a higher PL energy and ISB absorption energy. Simulations are employed to explain the experimental observations. ISB absorptions from 1.04 to 2.15 µm are demonstrated via controlling well width and growth temperature. [reprint (PDF)]
 
19.  The importance of band alignment in VLWIR type-II InAs/GaSb heterodiodes containing the M-structure barrier
D. Hoffman, B.M. Nguyen, E.K. Huang, P.Y. Delaunay, S. Bogdanov, P. Manukar, M. Razeghi, and V. Nathan
SPIE Proceedings, San Jose, CA Volume 7222-15-- January 26, 2009 ...[Visit Journal]
The Type-II InAs/GaSb superlattice photon detector is an attractive alternative to HgCdTe photodiodes and QWIPS. The use of p+ - pi - M - N+ heterodiode allows for greater flexibility in enhancing the device performance. The utilization of the Empirical Tight Binding method gives the band structure of the InAs/GaSb superlattice and the new M- structure (InAs/GaSb/AlSb/GaSb) superlattice allowing for the band alignment between the binary superlattice and the M- superlattice to be determined and see how it affects the optical performance. Then by modifying the doping level of the M- superlattice an optimal level can be determined to achieve high detectivity, by simultaneously improving both photo-response and reducing dark current for devices with cutoffs greater than 14.5 µm. [reprint (PDF)]
 
19.  Ultra-broadband quantum cascade laser, tunable over 760 cm−1, with balanced gain
N. Bandyopadhyay, M. Chen, S. Sengupta, S. Slivken, and M. Razeghi
Opt. Express 23, 21159-21164 -- August 10, 2015 ...[Visit Journal]
A heterogeneous quantum cascade laser, consisting of multiple stacks of discrete wavelength quantum cascade stages, emitting in 5.9-10.9 µm, wavelength range is reported. The broadband characteristics are demonstrated with a distributed-feedback laser array, emitting at fixed frequencies at room temperature, covering an emission range of ~760 cm−1, which is ~59% relative to the center frequency. By appropriate choice of a strained AlInAs/GaInAs material system, quantum cascade stage design and spatial arrangement of stages, the distributed-feedback array has been engineered to exhibit a flat threshold current density across the demonstrated range. [reprint (PDF)]
 
19.  Gain and recombination dynamics in photodetectors made with quantum nanostructures: the quantum dot in a well and the quantum well
B. Movaghar, S. Tsao, S. Abdollahi Pour, T. Yamanaka, and M. Razeghi
Virtual Journal of Nanoscale Science & Technology, Vol. 18, No. 14-- October 6, 2008 ...[Visit Journal][reprint (PDF)]
 
19.  Antimonite-based gap-engineered type-II superlattice materials grown by MBE and MOCVD for the third generation of infrared imagers
Manijeh Razeghi, Arash Dehzangi, Donghai Wu, Ryan McClintock, Yiyun Zhang, Quentin Durlin, Jiakai Li, Fanfei Meng
Proc. SPIE Defense + Commercial Sensing,Infrared Technology and Applications XLV, 110020G -- May 7, 2019 ...[Visit Journal]
Third generation of infrared imagers demand performances for higher detectivity, higher operating temperature, higher resolution, and multi-color detection all accomplished with better yield and lower manufacturing costs. Antimonidebased gap-engineered Type-II superlattices (T2SLs) material system is considered as a potential alternative for MercuryCadmium-Telluride (HgCdTe) technology in all different infrared detection regimes from short to very long wavelengths for the third generation of infrared imagers. This is due to the incredible growth in the understanding of its material properties and improvement of device processing which leads to design and fabrication of better devices. We will present the most recent research results on Antimonide-based gap-engineered Type-II superlattices, such as highperformance dual-band SWIR/MWIR photo-detectors and focal plane arrays for different infrared regimes, toward the third generation of infrared imaging systems at the Center for Zuantum Devices. Comparing metal-organic chemical vapor deposition (MOCVD), vs molecular beam epitaxy (MBE). [reprint (PDF)]
 
19.  TEG IN LP-MO CVD Ga 0 4 7 ln 0 S3 As-lnP SUPERLATTICE
M. RAZEGHIM. A. POISSONJ. P. LARIVAINB. de CREMOUXJ. P. DUCHEMIN
ELECTRONICS LETTERs, 1982 ,Vol. 18-- April 15, 1982 ...[Visit Journal]
We report the first successful growth of Ga o .4. 7 In 0 . J3 As-InPsuperlattice by the low-pressure metalorganic chemicalvapour deposition technique, and evidence for TEG proper-ties in these structures. [reprint (PDF)]
 
19.  Cubic Phase GaN on Nano-grooved Si (100) via Maskless Selective Area Epitaxy
Bayram, C., Ott, J. A., Shiu, K.-T., Cheng, C.-W., Zhu, Y., Kim, J., Razeghi, M. and Sadana, D. K.
Adv. Funct. Mater. 2014-- April 1, 2014 ...[Visit Journal]
A method of forming cubic phase (zinc blende) GaN (referred as c-GaN) on a CMOS-compatible on-axis Si (100) substrate is reported. Conventional GaN materials are hexagonal phase (wurtzite) (referred as h-GaN) and possess very high polarization fields (∼MV/cm) along the common growth direction of <0001>. Such large polarization fields lead to undesired shifts (e.g., wavelength and current) in the performance of photonic and vertical transport electronic devices. The cubic phase of GaN materials is polarization-free along the common growth direction of <001>, however, this phase is thermodynamically unstable, requiring low-temperature deposition conditions and unconventional substrates (e.g., GaAs). Here, novel nano-groove patterning and maskless selective area epitaxy processes are employed to integrate thermodynamically stable, stress-free, and low-defectivity c-GaN on CMOS-compatible on-axis Si. These results suggest that epitaxial growth conditions and nano-groove pattern parameters are critical to obtain such high quality c-GaN. InGaN/GaN multi-quantum-well structures grown on c-GaN/Si (100) show strong room temperature luminescence in the visible spectrum, promising visible emitter applications for this technology. [reprint (PDF)]
 
19.  High power broad area quantum cascade lasers
Y. Bai, S. Slivken, S.R. Darvish, A. Haddadi, B. Gokden and M. Razeghi
Applied Physics Letters, Vol. 95, No. 22, p. 221104-1-- November 30, 2009 ...[Visit Journal]
Broad area quantum cascade lasers (QCLs) are studied with ridge widths up to 400 µm, in room temperature pulsed mode operation at an emission wavelength around 4.45 µm. The peak output power scales linearly with the ridge width. A maximum total peak output power of 120 W is obtained from a single 400-µm-wide device with a cavity length of 3 mm. A stable far field emission characteristic is observed with dual lobes at ±38° for all tested devices, which suggests that these broad area QCLs are highly resistant to filamentation. [reprint (PDF)]
 
19.  4.5 mW Operation of AlGaN-based 267 nm Deep-Ultraviolet Light-Emitting Diodes
A. Yasan, R. McClintock, K. Mayes, D. Shiell, L. Gautero, S.R. Darvish, P. Kung and M. Razeghi
Applied Physics Letters, 83 (23)-- December 8, 2003 ...[Visit Journal]
We demonstrate 4.5 mW output power from AlGaN-based single quantum well ultraviolet light-emitting diodes at a very short wavelength of 267 nm in pulsed operation mode. The output power in continuous-wave mode reaches a value of 165 µW at an injected current of 435 mA. The measurements were done on arrays of four devices flip chip bonded to AlN submounts for thermal management. [reprint (PDF)]
 
19.  cw operation of 1.57‐μm GaxIn1−xAsyP1−yInP distributed feedback lasers grown by low‐pressure metalorganic chemical vapor deposition
M. Razeghi; R. Blondeau; K. Kazmierski; M. Krakowski; B. de Cremoux; J. P. Duchemin; J. C. Bouley
Appl. Phys. Lett. 45, 784–786 (1984)-- October 1, 1984 ...[Visit Journal]
Continuous wave operation of 1. 57-Jim distributed feedback lasers fabricated on material grown by two-step low-pressure metalorganic chemical vapor deposition growth process is reported for the first time. Room-temperature continuous wave threshold currents as low as 60 rnA have been measured for devices with cavity length of 300 Jim and stripe width of 5 Jim. Single longitudinal mode operation at fixed mode was obtained under the continuous wave condition, in the temperature range 9-90 °C, with the wavelength shift of 0.9 A/C. A stop band of25 A in which no resonance mode emission existed, was observed in the output spectrum of the distributed feedback laser. [reprint (PDF)]
 
19.  High Performance Quantum Cascade Lasers Grown by Gas-Source Molecular Beam Epitaxy
M. Razeghi, S. Slivken, A. Tahraoui and A. Matlis
SPIE Conference, San Jose, CA, -- January 22, 2001 ...[Visit Journal]
Recent improvements in quantum cascade laser technology have led to a number of very impressive results. This paper is a brief summary of the technological development and state-of- the-art performance of quantum cascade lasers produced at the Center for Quantum Devices. Laser design will be discussed, as well as experimental details of device fabrication. Room temperature QCL operation has been reported for lasers emitting between 5 - 11 μm, with 9 - 11 μm lasers operating up to 425 K. We also demonstrate record room temperature peak output powers at 9 and 11 μm(2.5 W and 1 W respectively) as well as record low 80 K threshold current densities (250 A/cm²) for some laser designs. Finally, some of the current limitations to laser efficiency are mentioned, as well as a means to combat them. [reprint (PDF)]
 
19.  Improved performance of IR photodetectors with 3D gap engineering
J. Piotrowski and M. Razeghi
Optoelectronic Integrated Circuit Materials, Physics and Devices, SPIE Conference, San Jose, CA; Proceedings, Vol. 2397-- February 6, 1995 ...[Visit Journal]
The ultimate signal-to-noise performance of the semiconductor photodetector is limited by the statistical fluctuations of the thermal generation and recombination rates in photodetector material. Cooling is an effective but impractical way of suppression of the thermal processes. The performance of uncooled detectors can be improved by minimizing the thermal generation and recombination rates and reducing the actual volume of photodetector. This can be realized in 3D heterostructure devices. In these devices, the incident radiation is absorbed in small regions of narrow gap semiconductor, buried in wide gap volume and supplied with wide gap electric contacts and radiation concentrators. The practical near room-temperature 1 - 12 μm IR heterostructure photodetectors are reported. The devices are based on variable gap Hg1-xCdxTe. The 3D heterostructures have been obtained by Isothermal Vapor Growth Epitaxy in a reusable growth system which enables in situ doping during growth with foreign impurities. Ion milling was extensively used in preparation of the devices. Monolithic optical immersion has been applied for further improvement of performance. The 3D heterostructure devices exhibit performance exceeding that of conventional photodetectors. [reprint (PDF)]
 
19.  High operating temperature 320 x 256 middle-wavelength infrared focal plane array imaging based on an InAs/InGaAs/InAlAs/InP quantum dot infrared photodetector
S. Tsao, H. Lim, W. Zhang, and M. Razeghi
Virtual Journal of Nanoscale Science and Technology-- May 28, 2007 ...[Visit Journal][reprint (PDF)]
 
19.  Long-Wavelength InAsSb Photoconductors Operated at Near Room Temperatures (200-300 K)
J.D. Kim, D. Wu, J. Wojkowski, J. Piotrowski, J. Xu, and M. Razeghi
Applied Physics Letters., 68 (1),-- January 1, 1996 ...[Visit Journal]
Long-wavelength InAs1−xSbx photoconductors operated without cryogenic cooling are reported. The devices are based on p-InAs1−xSbx/p-InSb heterostructures grown on (100) semi-insulating GaAs substrates by low pressure metalorganic chemical vapor deposition (LP‐MOCVD). Photoreponse up to 14 μm has been obtained in a sample with x=0.77 at 300 K, which is in good agreement with the measured infrared absorption spectra. The corresponding effective lifetime of ≊0.14 ns at 300 K has been derived from stationary photoconductivity. The Johnson noise limited detectivity at λ=10.6 μm is estimated to be about 3.27×107 cm· Hz½/W at 300 K. [reprint (PDF)]
 
19.  Near bulk-limited R0A of long-wavelength infrared type-II InAs/GaSb superlattice photodiodes with polyimide surface passivation
Andrew Hood, Pierre-Yves Delaunay, Darin Hoffman, Binh-Minh Nguyen, Yajun Wei, Manijeh Razeghi, and Vaidya Nathan
Applied Physics Letters 90, 233513-- June 4, 2007 ...[Visit Journal]
Effective surface passivation of Type-II InAs/GaSb superlattice photodiodes with cutoff wavelengths in the long-wavelength infrared is presented. A stable passivation layer, the electrical properties of which do not change as a function of the ambient environment nor time, has been prepared by a solvent-based surface preparation, vacuum desorption, and the application of an insulating polyimide layer. Passivated photodiodes, with dimensions ranging from 400×400 to 25×25 µm2, with a cutoff wavelength of ~11 µm, exhibited near bulk-limited R0A values of ~12 Ω·cm2, surface resistivities in excess of 104 Ω·cm, and very uniform current-voltage behavior at 77 K. [reprint (PDF)]
 
19.  Extremely high electron mobility in a GaAs‐GaxIn1−xP heterostructure grown by metalorganic chemical vapor deposition
M. Razeghi; M. Defour; F. Omnes; M. Dobers; J. P. Vieren; Y. Guldner
Appl. Phys. Lett. 55, 457–459 (1989)-- June 17, 1989 ...[Visit Journal]
On studying the magnetoresistivity of GaAs-GalnP heterostructures grown by low-pressure metalorganic chemical vapor deposition in magnetic fields up to 12 T and at liquid-helium temperatures, we have observed extremely high electron mobilities. Using the persistent photoconductivity effect, by illumination with red light, we reached a mobility of 780 000 cm2 / (V s) at an electron density of 4.1 X lOll cm- 2 . This high electron mobility is confirmed by cyclotron resonance measurements< [reprint (PDF)]
 
19.  A hybrid green light-emitting diode comprised of n-ZnO/(InGaN/GaN) multi-quantum-wells/p-GaN
C. Bayram, F. Hosseini Teherani, D.J. Rogers and M. Razeghi
Applied Physics Letters, Vol. 93, No. 8, p. 081111-1-- August 25, 2008 ...[Visit Journal]
Hybrid green light-emitting diodes (LEDs) comprised of n-ZnO/(InGaN/GaN) multi-quantum-wells/p-GaN were grown on semi-insulating AlN/sapphire using pulsed laser deposition for the n-ZnO and metal organic chemical vapor deposition for the other layers. X-ray diffraction revealed that high crystallographic quality was preserved after the n-ZnO growth. LEDs showed a turn-on voltage of 2.5 V and a room temperature electroluminescence (EL) centered at 510 nm. A blueshift and narrowing of the EL peak with increasing current was attributed to bandgap renormalization. The results indicate that hybrid LED structures could hold the prospect for the development of green LEDs with superior performance. [reprint (PDF)]
 
19.  A lifetime of contributions to the world of semiconductors using the Czochralski invention
Manijeh Razeghi
Journal of Vacuum Volume 146, Pages 308-328-- December 1, 2017 ...[Visit Journal]
Over the course of my career, I have made numerous contributions related to semiconductor crystal growth and high performance optoelectronics over a vast region of the electromagnetic spectrum (ultraviolet to terahertz). In 2016 this cumulated in my receiving the Jan Czochralski Gold Medal award from the European Materials Research Society. This article is designed to provide a historical perspective and general overview of these scientific achievements, on the occasion of being honored by this award. These achievements would not have been possible without high quality crystalline substrates, and this article is written in honor of Jan Czochralski on the 100th anniversary of his important discovery. [reprint (PDF)]
 
19.  AlxGa1-xN p-i-n Photodiodes on Sapphire Substrates
D. Walker, P. Kung, P. Sandvik, J. Wu, M. Hamilton, I.H. Lee, J. Diaz, and M. Razeghi
SPIE Conference, San Jose, CA, -- January 27, 1999 ...[Visit Journal]
We report the fabrication and characterization of AlxGa1-xN p-i-n photodiodes (0.05 ≤ to X ≤ 0.30) grown on sapphire by low-pressure metalorganic chemical vapor deposition. The devices present a visible-rejection of about four orders of magnitude with a cutoff wavelength that shifts from 350 nm to 291 nm. They also exhibit a constant responsivity for five decades (30 mW/m² to 1 kW/m²) of optical power density. Using capacitance measurements, the values for the acceptor concentration in the p-AlxGa1-xN region and the unintentional donor concentration in the intrinsic region are found. Photocurrent decays are exponential for high load resistances, with a time constant that corresponds to the RC product of the system. For low load resistances the transient response becomes non-exponential, with a decay time longer than the RC constant. [reprint (PDF)]
 
19.  Ga2O3/(Al)GaN Heterostructures for Next Generation Power Electronics
Manijeh Razeghi, N. Shrestha, V. E. Sandana, D. J. Rogers, F. H. Teherani
physica status solidi (b), 2026; 263:e70213
Gallium oxide (Ga2O3) is an emerging semiconductor for high-power electronics, but its low thermal conductivity, lack of viable p-type doping, and limited carrier mobility restrict device performance and prevent high-speed applications. This work presents a novel strategy to simultaneously mitigate the thermal and transport limitations of Ga2O3 through heterojunctions with III-nitride materials. Owing to their higher thermal conductivity and strong polarization fields, III-nitrides can enhance heat dissipation and enable high-density two-dimensional electron gases (2DEGs) at the heterointerface, improving switching speed. The role of spontaneous and piezoelectric polarization in 2DEG formation is systematically examined. It is shown that Al-polar AlN/β-Ga2O3 heterojunctions do not support 2DEG formation due to hole accumulation at the interface, whereas N-polar AlN/β-Ga2O3 heterostructures are identified as promising candidates for high 2DEG densities. The band alignment of the AlN/β-Ga2O3 interface is also investigated. Additionally, κ-Ga2O3, recently identified as ferroelectric with strong polarization, is explored in κ-Ga2O3/AlGaN heterostructures. Using epitaxial layer and strain engineering, electron mobilities up to 691 cm2 V−1 s −1 at 77 K were achieved in MOCVD-grown κ-Ga2O3/N-polar AlGaN/AlN heterostructures. These results highlight the potential of III-nitride/Ga2O3 heterostructures for high-power and radiofrequency device applications with enhanced performance and efficiency. [reprint (PDF)]
 

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