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3.  Effect of contact doping on superlattice-based minority carrier unipolar detectors
B.M. Nguyen, G. Chen, A.M. Hoang, S. Abdollahi Pour, S. Bogdanov, and M. Razeghi
Applied Physics Letters, Vol. 99, No. 3, p. 033501-1-- July 18, 2011 ...[Visit Journal]
We report the influence of the contact doping profile on the performance of superlattice-based minority carrier unipolar devices for mid-wave infrared detection. Unlike in a photodiode, the space charge in the p-contact of a pMp unipolar device is formed with accumulated mobile carriers, resulting in higher dark current in the device with highly doped p-contact. By reducing the doping concentration in the contact layer, the dark current is decreased by one order of magnitude. At 150 K, 4.9 μm cut-off devices exhibit a dark current of 2 × 10−5A/cm² and a quantum efficiency of 44%. The resulting specific detectivity is 6.2 × 1011 cm·Hz1/2/W at 150 K and exceeds 1.9 × 1014 cm·Hz1/2/W at 77 K. [reprint (PDF)]
 
3.  Investigation of impurities in type-II InAs/GaSb superlattices via capacitance-voltage measurement
G. Chen, A. M. Hoang, S. Bogdanov, A. Haddadi, P. R. Bijjam, B.-M. Nguyen, and M. Razeghi
Applied Physics Letters 103, 033512 (2013)-- July 17, 2013 ...[Visit Journal]
Capacitance-voltage measurement was utilized to characterize impurities in the non-intentionally doped region of Type-II InAs/GaSb superlattice p-i-n photodiodes. Ionized carrier concentration versus temperature dependence revealed the presence of a kind of defects with activation energy below 6 meV and a total concentration of low 1015 cm−3. Correlation between defect characteristics and superlattice designs was studied. The defects exhibited a p-type behavior with decreasing activation energy as the InAs thickness increased from 7 to 11 monolayers, while maintaining the GaSb thickness of 7 monolayers. With 13 monolayers of InAs, the superlattice became n-type and the activation energy deviated from the p-type trend. [reprint (PDF)]
 
3.  Top-emission ultraviolet light-emitting diodes with peak emission at 280 nm
A. Yasan, R. McClintock, K. Mayes, S.R. Darvish, P. Kung, and M. Razeghi
Virtual Journal of Nanoscale Science & Technology, 5-- August 5, 2002 ...[Visit Journal][reprint (PDF)]
 
3.  Monolithic, steerable, mid-infrared laser realized with no moving parts
Slivken S, Wu D, Razeghi M
Scientific Reports 7, 8472 -- May 24, 2018 ...[Visit Journal]
The mid-infrared (2.5 < λ < 25 μm) spectral region is utilized for many purposes, such as chemical/biological sensing, free space communications, and illuminators/countermeasures. Compared to near-infrared optical systems, however, mid-infrared component technology is still rather crude, with isolated components exhibiting limited functionality. In this manuscript, we make a significant leap forward in mid-infrared technology by developing a platform which can combine functions of multiple mid-infrared optical elements, including an integrated light source. In a single device, we demonstrate wide wavelength tuning (240 nm) and beam steering (17.9 degrees) in the mid-infrared with a significantly reduced beam divergence (down to 0.5 degrees). The architecture is also set up to be manufacturable and testable on a wafer scale, requiring no cleaved facets or special mirror coating to function. [reprint (PDF)]
 
2.  Broadband, Tunable, and Monolithic Quantum Cascade Lasers
M. Razeghi, Q. Y. Lu, N. Bandyopadhyay, W. Zhou, D. Heydari, Y. Bai, and S. Slivken.
Semiconductor lasers; (140.3600) Lasers, tunable-- May 19, 2017 ...[Visit Journal]
This article describes the state of research and recent developments related to broadband quantum cascade lasers. Monolithic tuning and system development is also discussed. [reprint (PDF)]
 
2.  High operability 1024 x 1024 long wavelength infrared focal plane array base on Type-II InAs/GaSb superlattice
A. Haddadi, S.R. Darvish, G. Chen, A.M. Hoang, B.M. Nguyen and M. Razeghi
AIP Conference Proceedings, Vol. 1416, p. 56-58_NGS15 Conf_Blacksburg, VA_Aug 1-5, 2011-- December 31, 2011 ...[Visit Journal]
Fabrication and characterization of a high performance 1024×1024 long wavelength infrared type‐II superlattice focal plane array are described. The FPA performs imaging at a continous rate of 15.00 frames/sec. Each pixel has pitch of 18μm with a fill factor of 71.31%. It demonstrates excellent operability of 95.8% and 97.4% at 81 and 68K operation temperature. The external quantum efficiency is ∼81% without any antireflective coating. Using F∕2 optics and an integration time of 0.13ms, the FPA exhibits an NEDT as low as 27 and 19mK at operating temperatures of 81 and 68K respectively. [reprint (PDF)]
 
2.  Stability of far fields in double heterostructure and multiple quantum well InAsSb/InPAsSb/InAs midinfrared lasers
H. Yi, A. Rybaltowski, J. Diaz, D. Wu, B. Lane, Y. Xiao, and M. Razeghi
Applied Physics Letters 70 (24)-- June 16, 1997 ...[Visit Journal]
Far fields in perpendicular direction to the junction are investigated in double heterostructure (DH) and multiple quantum well (MQW) midwave-infrared InAsSb/InPAsSb/InAs lasers (λ = 3.2–3.6 μm). Strong broadening of the far fields in the DH lasers was observed with increases in temperature and/or current. On the contrary, MQW lasers with otherwise identical structure exhibit very stable far fields as narrow as 23° for all the operating conditions investigated. Our experiment and theoretical modeling suggest that these different behaviors of far fields in DH and MQW lasers are attributed to the refractive index fluctuation in the InAsSb laser active region. [reprint (PDF)]
 
2.  High-Power CW Mid-IR Quantum Cascade Lasers
J.R. Meyer, W.W. Bewley, J.R. Lindle, I. Vurgaftman, A.J. Evans, J.S. Yu, S. Slivken, and M. Razeghi
SPIE Conference, Jose, CA, -- January 22, 2005 ...[Visit Journal]
We report the cw operation of quantum cascade lasers that do not require cryogenic cooling and emit at λ = 4.7-6.2 µm. At 200 K, more than 1 W of output power is obtained from 12-µm-wide stripes, with a wall-plug efficiency (ηwall) near 10%. Room-temperature cw operation has also been demonstrated, with a maximum output power of 640 mW (ηwall = 4.5%) at 6 µm and 260 mW (ηwall = 2.3%) at 4.8 µm. Far-field characterization indicates that whereas the beam quality remains close to the diffraction limit in all of the tested lasers, in the devices emitting at 6.2 µm the beam tends to steer by as much as 5-10° degrees in either direction with varying temperature and pump current. [reprint (PDF)]
 
2.  Gallium nitride on silicon for consumer & scalable photonics
C. Bayram, K.T. Shiu, Y. Zhu, C.W. Cheng, D.K. Sadana, Z. Vashaei, E. Cicek, R. McClintock and M. Razeghi
SPIE Proceedings, Vol. 8631, p. 863112-1, Photonics West, San Francisco, CA-- February 4, 2013 ...[Visit Journal]
Gallium Nitride (GaN) is a unique material system that has been heavily exploited for photonic devices thanks to ultraviolet-to-terahertz spectral tunability. However, without a cost effective approach, GaN technology is limited to laboratory demonstrations and niche applications. In this investigation, integration of GaN on Silicon (100) substrates is attempted to enable widespread application of GaN based optoelectronics. Controlled local epitaxy of wurtzite phase GaN on on-axis Si(100) substrates is demonstrated via metal organic chemical vapor deposition (MOCVD). CMOS-compatible fabrication scheme is used to realize [SiO2-Si{111}-Si{100}] groove structures on conventional 200-mm Si(100) substrates. MOCVD growth (surface treatment, nucleation, initiation) conditions are studied to achieve controlled GaN epitaxy on such grooved Si(100) substrates. Scanning electron microscopy and transmission electron microscopy techniques are used to determine uniformity and defectivity of the GaN. Our results show that aforementioned groove structures along with optimized MOCVD growth conditions can be used to achieve controlled local epitaxy of wurtzite phase GaN on on-axis Si(100) substrates. [reprint (PDF)]
 
2.  High-speed, low-noise metal-semiconductor-metal ultraviolet photodetectors based on GaN
D. Walker, E. Monroy, P. Kung, J. Wu, M. Hamilton, F.J. Sanchez, J. Diaz, and M. Razeghi
Applied Physics Letters 74 (5)-- February 1, 1999 ...[Visit Journal]
We present the fabrication and characterization of nonintentionally doped GaN and GaN:Mg Schottky metal–semiconductor–metal (MSM) photodetectors, grown on sapphire by metalorganic chemical vapor deposition. Low-leakage, Schottky contacts were made with Pt/Au. The devices are visible blind, with an ultraviolet/green contrast of about five orders of magnitude. The response times of the MSM devices were <10 ns and about 200 ns for GaN and GaN:Mg, respectively. The noise power spectral density remains below the background level of the system (10−24  A²/Hz) up to 5 V, for the undoped GaN MSM detector. [reprint (PDF)]
 
2.  High Power 0.98 μm GaInAs/GaAs/GaInP Multiple Quantum Well Laser
K. Mobarhan, M. Razeghi, G. Marquebielle and E. Vassilaki
Journal of Applied Physics 72 (9)-- November 1, 1992 ...[Visit Journal]
We report the fabrication of high quality Ga0.8In0.2As/GaAs/Ga0.51In0.49P multiple quantum well laser emitting at 0.98 μm grown by low pressure metalorganic chemical vapor deposition. Continuous wave operation with output power of 500 mW per facet was achieved at room temperature for a broad area laser with 130 μm width and 300 μm cavity length. This is an unusually high value of output power for this wavelength laser in this material system. The differential quantum efficiency exceeded 75% with excellent homogeneity and uniformity. The characteristic temperature, T0 was in the range of 120–130 K. [reprint (PDF)]
 
2.  Transport and photodetection in self-assembled semiconductor quantum dots
M Razeghi, H Lim, S Tsao, J Szafraniec, W Zhang, K Mi and B Movaghar
Nanotechnology 16 219-- January 7, 2005 ...[Visit Journal]
A great step forward in science and technology was made when it was discovered that lattice mismatch can be used to grow highly ordered, artificial atom-like structures called self-assembled quantum dots. Several groups have in the meantime successfully demonstrated useful infrared photodetection devices which are based on this technology. The new physics is fascinating, and there is no doubt that many new applications will be found when we have developed a better understanding of the underlying physical processes, and in particular when we have learned how to integrate the exciting new developments made in nanoscopic addressing and molecular self-assembly methods with semiconducting dots. In this paper we examine the scientific and technical questions encountered in current state of the art infrared detector technology and suggest ways of overcoming these difficulties. Promoting simple physical pictures, we focus in particular on the problem of high temperature detector operation and discuss the origin of dark current, noise, and photoresponse. [reprint (PDF)]
 
2.  High-quality visible-blind AlGaN p-i-n photodiodes
E. Monroy, M. Hamilton, D. Walker, P. Kung, F.J. Sanchez, and M. Razeghi
Applied Physics Letters 74 (8)-- February 22, 1999 ...[Visit Journal]
We report the fabrication and characterization of AlxGa1−xN p-i-n photodiodes (0 < x < 0.15) grown on sapphire by low-pressure metalorganic chemical vapor deposition. The devices present a visible rejection of six orders of magnitude with a cutoff wavelength that shifts from 365 to 338 nm. Photocurrent decays are exponential for high load resistances, with a time constant that corresponds to the RC product of the system. For low load resistances, the transient response becomes non-exponential, with a decay time longer than the RC constant. This behavior is justified by the strong frequency dependence of the device capacitance. By an admittance analysis, we conclude that speed is not limited by deep levels, but by substitutional Mg capture and emission time. [reprint (PDF)]
 
2.  Passivation of type-II InAs/GaSb double heterostructure
P.Y. Delaunay, A. Hood, B.M. Nguyen, D. Hoffman, Y. Wei, and M. Razeghi
Applied Physics Letters, Vol. 91, No. 9, p. 091112-1-- August 27, 2007 ...[Visit Journal]
Focal plane array fabrication requires a well passivated material that is resistant to aggressive processes. The authors report on the ability of type-II InAs/GaSb superlattice heterodiodes to be more resilient than homojunctions diodes in improving sidewall resistivity through the use of various passivation techniques. The heterostructure consisting of two wide band gap (5 µm) superlattice contacts and a low band gap active region (11 µm) exhibits an R0A averaging of 13·Ω cm2. The devices passivated with SiO2, Na2S and SiO2 or polyimide did not degrade compared to the unpassivated sample and the resistivity of the sidewalls increased to 47 kΩ·cm. [reprint (PDF)]
 
2.  High-Average-Power, High-Duty-Cycle (~6 μm) Quantum Cascade Lasers
S. Slivken, A. Evans, J. David, and M. Razeghi
Applied Physics Letters, 81 (23)-- December 2, 2002 ...[Visit Journal]
High-power quantum cascade lasers emitting at λ = 6.1  μm are demonstrated. Accurate control of growth parameters and strain balancing results in a near-perfect lattice match, which leads to excellent material quality. Excellent peak power for uncoated lasers, up to 1.5 W per facet for a 21 μm emitter width, is obtained at 300 K for 30 period structures. The threshold current density at 300 K is only 2.4 kA/cm². From 300 to 425 K, the laser exhibits a characteristic temperature T0 of 167 K. Next, Y2O3/Ti/Au mirror coatings were deposited on 1.5 mm cavities and mounted epilayer down. These lasers show an average output power of up to 225 mW at 17% duty cycle, and still show 8 mW average power at 45% duty cycle. [reprint (PDF)]
 
2.  Growth of InAsSb Alloys on GaAs and Si Substrates for Uncooled Infrared Photodetector Applications
J.D. Kim, H. Mohseni, J.S. Wojkowski, J.J. Lee and M. Razeghi
SPIE Conference, San Jose, CA, -- January 27, 1999 ...[Visit Journal]
In this paper, we report on the growth and characterization of InAsSb alloys on GaAs and Si substrates for uncooled infrared photodetector applications. The fabrication and characterization of photodetectors from the grown layers are also reported. The photovoltaic and photoconductive devices were grown on (100) GaAs and Si substrates, respectively, using molecular beam epitaxy (MBE). The composition of InAs>sub>1-xSbx layers was 0.95 in both cases and cut-off wavelength of 7-8 μm has been obtained. At 300 K, the photovoltaic detectors on GaAs substrates resulted in a sharp cut-off wavelength of 7.5 μm with a peak responsivity as high as 0.32 V/W at 6.5 micrometer. For the photoconductive detectors on Si substrates, cut-off wavelength of 8 μm has been observed with a responsivity of 6.3x10-2 V/W at 7 μm under an electric field of 420 V/m. [reprint (PDF)]
 
2.  Geiger-Mode Operation of AlGaN Avalanche Photodiodes at 255 nm
Lakshay Gautam, Alexandre Guillaume Jaud, Junhee Lee, Gail J. Brown, Manijeh Razeghi
Published in: IEEE Journal of Quantum Electronics ( Volume: 57, Issue: 2, April 2021) ...[Visit Journal]
We report the Geiger mode operation of back-illuminated AlGaN avalanche photodiodes. The devices were fabricated on transparent AlN templates specifically for back-illumination to leverage hole-initiated multiplication. The spectral response was analyzed with a peak detection wavelength of 255 nm with an external quantum efficiency of ~14% at zero bias. Low-photon detection capabilities were demonstrated in devices with areas 25 μm×25 μm. Single photon detection efficiencies of ~5% were achieved. [reprint (PDF)]
 
2.  Low irradiance background limited type-II superlattice MWIR M-barrier imager
E.K. Huang, S. Abdollahi Pour, M.A. Hoang, A. Haddadi, M. Razeghi and M.Z. Tidrow
OSA Optics Letters (OL), Vol. 37, No. 11, p. 2025-2027-- June 1, 2012 ...[Visit Journal]
We report a type-II superlattice mid-wave infrared 320 × 256 imager at 81 K with the M-barrier design that achieved background limited performance (BLIP) and ∼99%operability. The 280 K blackbody’s photon irradiance was limited by an aperture and a band-pass filter from 3.6 μm to 3.8 μm resulting in a total flux of ∼5 × 1012 ph·cm−2·s−1. Under these low-light conditions, and consequently the use of a 13.5 ms integration time, the imager was observed to be BLIP thanks to a ∼5 pA dark current from the 27 μm wide pixels. The total noise was dominated by the photon flux and read-out circuit which gave the imager a noise equivalent input of ∼5 × 1010 ph·cm−2·s−1 and temperature sensitivity of 9 mK with F∕2.3 optics. Excellent imagery obtained using a 1-point correction alludes to the array’s uniform responsivity. [reprint (PDF)]
 
2.  Surface Emitting, Tunable, Mid-Infrared Laser with High Output Power and Stable Output Beam
Steven Slivken, Donghai Wu & Manijeh Razeghi
Scientific Reports volume 9, Article number: 549-- January 24, 2019 ...[Visit Journal]
A reflective outcoupler is demonstrated which can allow for stable surface emission from a quantum cascade laser and has potential for cost-effective wafer-scale manufacturing. This outcoupler is integrated with an amplified, electrically tunable laser architecture to demonstrate high power surface emission at a wavelength near 4.9 μm. Single mode peak power up to 6.7 W is demonstrated with >6 W available over a 90 cm−1 (215 nm) spectral range. A high quality output beam is realized with a simple, single-layer, anti-reflective coating. The beam shape and profile are shown to be independent of wavelength. [reprint (PDF)]
 
2.  High-Power Continuous-Wave Operation of Quantum-Cascade Lasers Up to 60 °C
J.S. Yu, A. Evans, J. David, L. Doris, S. Slivken and M. Razeghi
IEEE Photonics Technology Letters, 16 (3)-- March 1, 2004 ...[Visit Journal]
High-temperature high-power continuous-wave (CW) operation of high-reflectivity-coated 12 μm wide quantum-cascade lasers emitting at λ = 6 μm with a thick electroplated Au top contact layer is reported for different cavity lengths. For a 3 mm long laser, the CW optical output powers of 381 mW at 293 K and 22 mW at maximum operating temperature of 333 K (60°C) are achieved with threshold current densities of 1.93 and 3.09 kA/cm2, respectively. At 298 K, the same cavity gives a maximum wall plug efficiency of 3.17% at 1.07 A. An even higher CW optical output power of 424 mW at 293 K is obtained for a 4-mm-long laser and the device also operates up to 332 K with an output power of 14 mW. Thermal resistance is also analyzed at threshold as a function of cavity length. [reprint (PDF)]
 
2.  Very high performance LWIR and VLWIR type-II InAs/GaSb superlattice photodiodes with M-structure barrier
B.M. Nguyen, D. Hoffman, P.Y. Delaunay, E.K. Huang and M. Razeghi
SPIE Proceedings, Vol. 7082, San Diego, CA 2008, p. 708205-- September 3, 2008 ...[Visit Journal]
LWIR and VLWIR type-II InAs/GaSb superlattice photodetectors have for long time suffered from a high dark current level and a low dynamic resistance which hampers the its emergence to the infrared detection and imaging industry. However, with the use of M-structure superlattice, a new Type-II binary InAs/GaSb/AlSb superlattice design, as an effective blocking barrier, the dark current in type-II superlattice diode has been significantly reduced. We have obtained comparable differential resistance product to the MCT technology at the cut-off wavelength of 10 and 14μm. Also, this new design is compatible with the optical optimization scheme, leading to high quantum efficiency, high special detectivity devices for photon detectors and focal plane arrays. [reprint (PDF)]
 
2.  Type-II InAs/GaSb Superlattice Focal Plane Arrays for High-Performance Third Generation Infrared Imaging and Free-Space Communication
M. Razeghi, A. Hood and A. Evans
SPIE Conference, January 25-29, 2007, San Jose, CA Proceedings – Optoelectronic Integrated Circuits IX, Vol. 6476, p. 64760Q-1-9-- January 29, 2007 ...[Visit Journal]
Free-space optical communications has recently been touted as a solution to the "last mile" bottleneck of high speed data networks providing highly secure, short to long range, and high bandwidth connections. However, commercial near infrared systems experience atmospheric scattering losses and scintillation effects which can adversely affect a link's uptime. By moving the operating wavelength into the mid or long wavelength infrared enhanced link uptimes and increased range can be achieved due to less susceptibility atmospheric affects. The combination of room temperature, continuous wave' high power quantum cascade lasers and high operating temperature Type-II superlattice photodetectors offers the benefits of mid and long wavelength infrared systems as well as practical operating conditions. [reprint (PDF)]
 
2.  Injector doping level dependent continuous-wave operation of InP-based QCLs at λ~ 7.3 µm above room temperature
J.S. Yu, S. Slivken, and M. Razeghi
Semiconductor Science and Technology (SST), Vol. 25, No. 12, p. 125015-- December 1, 2010 ...[Visit Journal]
We report the continuous-wave (CW) operation of InGaAs/InAlAs quantum cascade lasers (QCLs) operating at λ ~ 7.3 µm above room temperature. The injector doping level–dependent CW characteristics above room temperature are investigated for doping densities between 7 × 1016 cm−3 and 2 × 1017 cm−3. The device performance, i.e. threshold current density, output power, operating temperature and characteristic temperature, depends strongly on the injector doping density. For a relatively low injector doping density of 7 × 1016 cm−3, a high-reflectivity-coated 10 µm wide and 4 mm long laser exhibits an improved device performance with an output power of 152 mW and a threshold current density of 1.37 kA cm−2 at 298 K under CW mode, operating up to 343 K. The thermal characteristics are also analyzed by the estimation from the experimentally measured data for the QCLs with different injector doping densities. [reprint (PDF)]
 
2.  Minority electron unipolar photodetectors based on Type-II InAs/GaSb/AlSb superlattices for very long wavelength infrared detection
B.M. Nguyen, S. Bogdanov, S. Abdollahi Pour, and M. Razeghi
Applied Physics Letters, Vol. 95, No. 18, p. 183502-- November 2, 2009 ...[Visit Journal]
We present a hybrid photodetector design that inherits the advantages of traditional photoconductive and photovoltaic devices. The structure consists of a barrier layer blocking the transport of majority holes in a p-type semiconductor, resulting in an electrical transport due to minority carriers with low current density. By using the M-structure superlattice as a barrier region, the band alignments can be experimentally controlled, allowing for the efficient extraction of the photosignal with less than 50 mV bias. At 77 K, a 14 µm cutoff detector exhibits a dark current 3.3 mA·cm−2, a photoresponsivity of 1.4 A/W, and the associated shot noise detectivity of 4×1010 Jones. [reprint (PDF)]
 
2.  New frontiers in InP based quantum devices
Manijeh Razeghi
Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on, pp.1,4, (2008)-- May 29, 2008 ...[Visit Journal]
Recent research activities taking place at center for quantum devices (CQD) based on InP material system, especially the exploration and demonstration of the state-of-art high performance quantum cascade lasers (QCL), greatly facilitate the understanding of the underlining physical principles governing the device operation. Thanks to the endless effort putting into the semiconductor epitaxy technologies, including the Molecular Beam Epitaxy (MBE) and low pressure metal organic chemical vapor deposition (LP-MOCVD), the world has seen a close approaching to the ultimate band gap engineering. Highly sophisticated man-made heterostructure, which incorporates hundreds of alternating layers of GaInAs/AlInAs with each layer thickness and composition specifically designed, can be created within a single growth. The material quality is evidenced by the atomically abrupt interfaces. The versatility of the band gap engineering is greatly enhanced by the strain-balanced technique, which allows for growing structures with continuously tunable conduction band offset with little defects. As a result, the room temperature continuous wave (CW) wall plug efficiency (WPE) and the maximum achievable output optical power from a single device have been constantly improving. Novel waveguide incorporating the photonic crystal distributed feedback (PCDFB) mechanism is also investigated with satisfactory preliminary results. [reprint (PDF)]
 

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